diff --git a/components/esp_driver_gpio/src/gpio_etm.c b/components/esp_driver_gpio/src/gpio_etm.c
index b0a3ea61ea..d521a64e72 100644
--- a/components/esp_driver_gpio/src/gpio_etm.c
+++ b/components/esp_driver_gpio/src/gpio_etm.c
@@ -8,11 +8,6 @@
 #include <string.h>
 #include <sys/cdefs.h>
 #include "sdkconfig.h"
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-// The local log level must be defined before including esp_log.h
-// Set the maximum log level for this source file
-#define LOG_LOCAL_LEVEL ESP_LOG_DEBUG
-#endif
 #include "freertos/FreeRTOS.h"
 #include "driver/gpio.h"
 #include "driver/gpio_etm.h"
@@ -151,9 +146,6 @@ static esp_err_t gpio_del_etm_task(esp_etm_task_t *task)
 
 esp_err_t gpio_new_etm_event(const gpio_etm_event_config_t *config, esp_etm_event_handle_t *ret_event, ...)
 {
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-    esp_log_level_set(TAG, ESP_LOG_DEBUG);
-#endif
     esp_err_t ret = ESP_OK;
     int chan_id = -1;
     uint8_t event_mask = 0;
@@ -243,9 +235,6 @@ err:
 
 esp_err_t gpio_new_etm_task(const gpio_etm_task_config_t *config, esp_etm_task_handle_t *ret_task, ...)
 {
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-    esp_log_level_set(TAG, ESP_LOG_DEBUG);
-#endif
     esp_err_t ret = ESP_OK;
     int chan_id = -1;
     uint8_t task_mask = 0;
diff --git a/components/esp_driver_sdm/src/sdm.c b/components/esp_driver_sdm/src/sdm.c
index 4ea47994aa..0a233bf100 100644
--- a/components/esp_driver_sdm/src/sdm.c
+++ b/components/esp_driver_sdm/src/sdm.c
@@ -126,7 +126,7 @@ static sdm_group_t *sdm_acquire_group_handle(int group_id, sdm_clock_source_t cl
             group->clk_src = clk_src;
 
 #if SDM_USE_RETENTION_LINK
-            sleep_retention_module_t module = soc_sdm_retention_infos[group->group_id].module;
+            sleep_retention_module_t module = soc_sdm_retention_infos[group_id].module;
             sleep_retention_module_init_param_t init_param = {
                 .cbs = {
                     .create = {
@@ -138,7 +138,7 @@ static sdm_group_t *sdm_acquire_group_handle(int group_id, sdm_clock_source_t cl
             };
             // retention module init must be called BEFORE the hal init
             if (sleep_retention_module_init(module, &init_param) != ESP_OK) {
-                ESP_LOGW(TAG, "init sleep retention failed on SDM Group%d, power domain may be turned off during sleep", group->group_id);
+                ESP_LOGW(TAG, "init sleep retention failed on SDM Group%d, power domain may be turned off during sleep", group_id);
             }
 #endif // SDM_USE_RETENTION_LINK
 
@@ -408,7 +408,7 @@ esp_err_t sdm_channel_set_pulse_density(sdm_channel_handle_t chan, int8_t densit
     bool valid_state = false;
     sdm_fsm_t expected_fsm = SDM_FSM_INIT;
     sdm_fsm_t restore_fsm = SDM_FSM_INIT;
-    // check if the channel is in INIT state, if so, change it to WAIT state
+    // this function can be called only when the channel is in init or enable state
     if (atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, SDM_FSM_WAIT)) {
         valid_state = true;
         restore_fsm = SDM_FSM_INIT;
@@ -430,7 +430,8 @@ esp_err_t sdm_channel_set_pulse_density(sdm_channel_handle_t chan, int8_t densit
     sdm_ll_set_pulse_density(group->hal.dev, chan_id, density);
     portEXIT_CRITICAL_SAFE(&chan->spinlock);
 
-    atomic_store(&chan->fsm, restore_fsm); // restore the state
+    // restore the state
+    atomic_store(&chan->fsm, restore_fsm);
 
     return ESP_OK;
 }
diff --git a/components/esp_driver_tsens/src/temperature_sensor_etm.c b/components/esp_driver_tsens/src/temperature_sensor_etm.c
index b6059e5092..9a3f680fe6 100644
--- a/components/esp_driver_tsens/src/temperature_sensor_etm.c
+++ b/components/esp_driver_tsens/src/temperature_sensor_etm.c
@@ -12,11 +12,6 @@
 #include "hal/temperature_sensor_ll.h"
 #include "driver/temperature_sensor_etm.h"
 #include "esp_heap_caps.h"
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-// The local log level must be defined before including esp_log.h
-// Set the maximum log level for this source file
-#define LOG_LOCAL_LEVEL ESP_LOG_DEBUG
-#endif
 #include "esp_log.h"
 
 #define ETM_MEM_ALLOC_CAPS   MALLOC_CAP_DEFAULT
@@ -37,9 +32,6 @@ static esp_err_t temperature_sensor_del_etm_task(esp_etm_task_t *task)
 
 esp_err_t temperature_sensor_new_etm_event(temperature_sensor_handle_t tsens, const temperature_sensor_etm_event_config_t *config, esp_etm_event_handle_t *out_event)
 {
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-    esp_log_level_set(TAG, ESP_LOG_DEBUG);
-#endif
     esp_etm_event_t *event = NULL;
     esp_err_t ret = ESP_OK;
     ESP_GOTO_ON_FALSE(tsens && config && out_event, ESP_ERR_INVALID_ARG, err, TAG, "invalid argument");
@@ -67,9 +59,6 @@ err:
 
 esp_err_t temperature_sensor_new_etm_task(temperature_sensor_handle_t tsens, const temperature_sensor_etm_task_config_t *config, esp_etm_task_handle_t *out_task)
 {
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-    esp_log_level_set(TAG, ESP_LOG_DEBUG);
-#endif
     esp_etm_task_t *task = NULL;
     esp_err_t ret = ESP_OK;
     ESP_GOTO_ON_FALSE(tsens && config && out_task, ESP_ERR_INVALID_ARG, err, TAG, "invalid argument");
diff --git a/components/esp_hw_support/CMakeLists.txt b/components/esp_hw_support/CMakeLists.txt
index dd3a052c89..ca9622c21c 100644
--- a/components/esp_hw_support/CMakeLists.txt
+++ b/components/esp_hw_support/CMakeLists.txt
@@ -5,7 +5,7 @@ idf_build_get_property(non_os_build NON_OS_BUILD)
 if(${target} STREQUAL "linux")
     idf_component_register(SRCS "port/linux/esp_random.c"
                                  "port/linux/chip_info.c"
-                           INCLUDE_DIRS "include")
+                           INCLUDE_DIRS "include" "etm/include")
     return()
 endif()
 
@@ -122,7 +122,7 @@ if(NOT non_os_build)
     endif()
 
     if(CONFIG_SOC_ETM_SUPPORTED)
-        list(APPEND srcs "esp_etm.c")
+        list(APPEND srcs "etm/esp_etm.c")
     endif()
 
     if(CONFIG_SOC_PAU_SUPPORTED)
@@ -175,7 +175,7 @@ else()
 endif()
 
 set(public_include_dirs "include" "include/soc"
-                        "dma/include" "ldo/include" "debug_probe/include"
+                        "dma/include" "ldo/include" "debug_probe/include" "etm/include"
                         "mspi_timing_tuning/include" "mspi_timing_tuning/tuning_scheme_impl/include"
                         "power_supply/include")
 
diff --git a/components/esp_hw_support/Kconfig b/components/esp_hw_support/Kconfig
index f16ca70eb5..7d20a580f5 100644
--- a/components/esp_hw_support/Kconfig
+++ b/components/esp_hw_support/Kconfig
@@ -238,17 +238,8 @@ menu "Hardware Settings"
                 so that these functions can be IRAM-safe and able to be called in the other IRAM interrupt context.
     endmenu
 
-    menu "ETM Configuration"
-        depends on SOC_ETM_SUPPORTED
-        config ETM_ENABLE_DEBUG_LOG
-            bool "Enable debug log"
-            default n
-            help
-                whether to enable the debug log message for ETM core driver.
-                Note that, this option only controls the ETM related driver log, won't affect other drivers.
-    endmenu # ETM Configuration
-
     rsource "./dma/Kconfig.dma"
+    rsource "./etm/Kconfig.etm"
 
     menu "Main XTAL Config"
         orsource "./port/$IDF_TARGET/Kconfig.xtal"
diff --git a/components/esp_hw_support/etm/Kconfig.etm b/components/esp_hw_support/etm/Kconfig.etm
new file mode 100644
index 0000000000..935c7dda51
--- /dev/null
+++ b/components/esp_hw_support/etm/Kconfig.etm
@@ -0,0 +1,12 @@
+menu "Event Task Matrix (ETM) Configurations"
+    depends on SOC_ETM_SUPPORTED
+    config ETM_ENABLE_DEBUG_LOG
+        bool "Force enable debug log"
+        default n
+        help
+            If enabled, ETM driver will:
+            1. ignore the global logging settings
+            2. compile all log messages into the binary
+            3. set the runtime log level to VERBOSE
+            Please enable this option by caution, as it will increase the binary size.
+endmenu # ETM Configuration
diff --git a/components/esp_hw_support/esp_etm.c b/components/esp_hw_support/etm/esp_etm.c
similarity index 70%
rename from components/esp_hw_support/esp_etm.c
rename to components/esp_hw_support/etm/esp_etm.c
index e3507f64e2..933aeb3ff2 100644
--- a/components/esp_hw_support/esp_etm.c
+++ b/components/esp_hw_support/etm/esp_etm.c
@@ -5,17 +5,17 @@
  */
 
 #include <stdlib.h>
+#include <stdatomic.h>
 #include <sys/cdefs.h>
 #include <sys/lock.h>
 #include "sdkconfig.h"
 #if CONFIG_ETM_ENABLE_DEBUG_LOG
 // The local log level must be defined before including esp_log.h
 // Set the maximum log level for this source file
-#define LOG_LOCAL_LEVEL ESP_LOG_DEBUG
+#define LOG_LOCAL_LEVEL ESP_LOG_VERBOSE
 #endif
 #include "freertos/FreeRTOS.h"
 #include "freertos/task.h"
-#include "soc/soc_caps.h"
 #include "soc/etm_periph.h"
 #include "esp_log.h"
 #include "esp_check.h"
@@ -39,34 +39,35 @@
 #define ETM_RCC_ATOMIC()
 #endif
 
-static const char *TAG = "etm";
+#define TAG "etm"
 
 typedef struct etm_platform_t etm_platform_t;
 typedef struct etm_group_t etm_group_t;
 typedef struct esp_etm_channel_t esp_etm_channel_t;
 
 struct etm_platform_t {
-    _lock_t mutex;                        // platform level mutex lock
-    etm_group_t *groups[SOC_ETM_GROUPS];  // etm group pool
-    int group_ref_counts[SOC_ETM_GROUPS]; // reference count used to protect group install/uninstall
+    _lock_t mutex;                                // platform level mutex lock
+    etm_group_t *groups[SOC_ETM_ATTR(INST_NUM)];  // etm group pool
+    int group_ref_counts[SOC_ETM_ATTR(INST_NUM)]; // reference count used to protect group install/uninstall
 };
 
 struct etm_group_t {
     int group_id;          // hardware group id
     etm_hal_context_t hal; // hardware abstraction layer context
-    portMUX_TYPE spinlock; // to protect per-group register level concurrent access
-    esp_etm_channel_t *chans[SOC_ETM_CHANNELS_PER_GROUP];
+    portMUX_TYPE spinlock; // to protect per-group light weight resource access
+    esp_etm_channel_t *chans[SOC_ETM_ATTR(CHANS_PER_INST)]; // array of channels in the group
 };
 
 typedef enum {
     ETM_CHAN_FSM_INIT,
     ETM_CHAN_FSM_ENABLE,
+    ETM_CHAN_FSM_WAIT,
 } etm_chan_fsm_t;
 
 struct esp_etm_channel_t {
     int chan_id;        // Channel ID
     etm_group_t *group; // which group this channel belongs to
-    etm_chan_fsm_t fsm; // record ETM channel's driver state
+    _Atomic etm_chan_fsm_t fsm;   // record ETM channel's driver state
     esp_etm_event_handle_t event; // which event is connect to the channel
     esp_etm_task_handle_t task;   // which task is connect to the channel
 };
@@ -79,21 +80,21 @@ static esp_err_t etm_create_sleep_retention_link_cb(void *arg)
 {
     etm_group_t *group = (etm_group_t *)arg;
     int group_id = group->group_id;
-    esp_err_t err = sleep_retention_entries_create(etm_reg_retention_info[group_id].regdma_entry_array,
-                                                   etm_reg_retention_info[group_id].array_size,
-                                                   REGDMA_LINK_PRI_ETM, etm_reg_retention_info[group_id].module);
+    esp_err_t err = sleep_retention_entries_create(soc_etm_retention_info[group_id].regdma_entry_array,
+                                                   soc_etm_retention_info[group_id].array_size,
+                                                   REGDMA_LINK_PRI_ETM, soc_etm_retention_info[group_id].module);
     return err;
 }
 
 static void etm_create_retention_module(etm_group_t *group)
 {
     int group_id = group->group_id;
-    sleep_retention_module_t module = etm_reg_retention_info[group_id].module;
+    sleep_retention_module_t module = soc_etm_retention_info[group_id].module;
     _lock_acquire(&s_platform.mutex);
     if (sleep_retention_is_module_inited(module) && !sleep_retention_is_module_created(module)) {
         if (sleep_retention_module_allocate(module) != ESP_OK) {
             // even though the sleep retention module create failed, ETM driver should still work, so just warning here
-            ESP_LOGW(TAG, "create retention link failed %d, power domain won't be turned off during sleep", group_id);
+            ESP_LOGW(TAG, "create retention link failed on ETM Group%d, power domain won't be turned off during sleep", group_id);
         }
     }
     _lock_release(&s_platform.mutex);
@@ -120,8 +121,9 @@ static etm_group_t *etm_acquire_group_handle(int group_id)
                 etm_ll_enable_bus_clock(group_id, true);
                 etm_ll_reset_register(group_id);
             }
+
 #if ETM_USE_RETENTION_LINK
-            sleep_retention_module_t module = etm_reg_retention_info[group_id].module;
+            sleep_retention_module_t module = soc_etm_retention_info[group_id].module;
             sleep_retention_module_init_param_t init_param = {
                 .cbs = {
                     .create = {
@@ -131,11 +133,13 @@ static etm_group_t *etm_acquire_group_handle(int group_id)
                 },
                 .depends = RETENTION_MODULE_BITMAP_INIT(CLOCK_SYSTEM)
             };
+            // retention module init must be called BEFORE the hal init
             if (sleep_retention_module_init(module, &init_param) != ESP_OK) {
                 // even though the sleep retention module init failed, ETM driver may still work, so just warning here
-                ESP_LOGW(TAG, "init sleep retention failed %d, power domain may be turned off during sleep", group_id);
+                ESP_LOGW(TAG, "init sleep retention failed on ETM Group%d, power domain may be turned off during sleep", group_id);
             }
 #endif // ETM_USE_RETENTION_LINK
+
             // initialize HAL context
             etm_hal_init(&group->hal);
         }
@@ -166,23 +170,25 @@ static void etm_release_group_handle(etm_group_t *group)
         assert(s_platform.groups[group_id]);
         do_deinitialize = true;
         s_platform.groups[group_id] = NULL; // deregister from platform
+        etm_hal_deinit(&group->hal);
         // disable the bus clock for the ETM registers
         ETM_RCC_ATOMIC() {
             etm_ll_enable_bus_clock(group_id, false);
         }
-    }
-    _lock_release(&s_platform.mutex);
 
-    if (do_deinitialize) {
 #if ETM_USE_RETENTION_LINK
-        sleep_retention_module_t module = etm_reg_retention_info[group_id].module;
+        sleep_retention_module_t module = soc_etm_retention_info[group_id].module;
         if (sleep_retention_is_module_created(module)) {
             sleep_retention_module_free(module);
         }
         if (sleep_retention_is_module_inited(module)) {
             sleep_retention_module_deinit(module);
         }
-#endif
+#endif // ETM_USE_RETENTION_LINK
+    }
+    _lock_release(&s_platform.mutex);
+
+    if (do_deinitialize) {
         free(group);
         ESP_LOGD(TAG, "del group (%d)", group_id);
     }
@@ -192,25 +198,24 @@ static esp_err_t etm_chan_register_to_group(esp_etm_channel_t *chan)
 {
     etm_group_t *group = NULL;
     int chan_id = -1;
-    for (int i = 0; i < SOC_ETM_GROUPS; i++) {
+    for (int i = 0; i < SOC_ETM_ATTR(INST_NUM); i++) {
         group = etm_acquire_group_handle(i);
         ESP_RETURN_ON_FALSE(group, ESP_ERR_NO_MEM, TAG, "no mem for group (%d)", i);
         // loop to search free channel in the group
         esp_os_enter_critical(&group->spinlock);
-        for (int j = 0; j < SOC_ETM_CHANNELS_PER_GROUP; j++) {
+        for (int j = 0; j < SOC_ETM_ATTR(CHANS_PER_INST); j++) {
             if (!group->chans[j]) {
                 chan_id = j;
                 group->chans[j] = chan;
+                chan->chan_id = chan_id;
+                chan->group = group;
                 break;
             }
         }
         esp_os_exit_critical(&group->spinlock);
         if (chan_id < 0) {
             etm_release_group_handle(group);
-            group = NULL;
         } else {
-            chan->chan_id = chan_id;
-            chan->group = group;
             break;
         }
     }
@@ -240,31 +245,34 @@ static esp_err_t etm_chan_destroy(esp_etm_channel_t *chan)
 
 esp_err_t esp_etm_new_channel(const esp_etm_channel_config_t *config, esp_etm_channel_handle_t *ret_chan)
 {
-#if CONFIG_ETM_ENABLE_DEBUG_LOG
-    esp_log_level_set(TAG, ESP_LOG_DEBUG);
-#endif
     esp_err_t ret = ESP_OK;
     esp_etm_channel_t *chan = NULL;
-    ESP_GOTO_ON_FALSE(config && ret_chan, ESP_ERR_INVALID_ARG, err, TAG, "invalid args");
+    ESP_RETURN_ON_FALSE(config && ret_chan, ESP_ERR_INVALID_ARG, TAG, "invalid args");
+
+    [[maybe_unused]] bool allow_pd = config->flags.allow_pd == 1;
 #if !SOC_ETM_SUPPORT_SLEEP_RETENTION
-    ESP_RETURN_ON_FALSE(config->flags.allow_pd == 0, ESP_ERR_NOT_SUPPORTED, TAG, "not able to power down in light sleep");
+    ESP_RETURN_ON_FALSE(allow_pd == 0, ESP_ERR_NOT_SUPPORTED, TAG, "not able to power down in light sleep");
 #endif // SOC_ETM_SUPPORT_SLEEP_RETENTION
 
-    chan = heap_caps_calloc(1, sizeof(esp_etm_channel_t), ETM_MEM_ALLOC_CAPS);
-    ESP_GOTO_ON_FALSE(chan, ESP_ERR_NO_MEM, err, TAG, "no mem for channel");
+    // allocate channel memory from internal memory because it contains atomic variable
+    chan = heap_caps_calloc(1, sizeof(esp_etm_channel_t), MALLOC_CAP_INTERNAL | MALLOC_CAP_8BIT);
+    ESP_RETURN_ON_FALSE(chan, ESP_ERR_NO_MEM, TAG, "no mem for channel");
+
     // register channel to the group, one group can have multiple channels
-    ESP_GOTO_ON_ERROR(etm_chan_register_to_group(chan), err, TAG, "register channel failed");
+    ESP_GOTO_ON_ERROR(etm_chan_register_to_group(chan), err, TAG, "register channel to group failed");
     etm_group_t *group = chan->group;
     int group_id = group->group_id;
     int chan_id = chan->chan_id;
 
+    // set the initial state to INIT
+    atomic_init(&chan->fsm, ETM_CHAN_FSM_INIT);
+
 #if ETM_USE_RETENTION_LINK
-    if (config->flags.allow_pd != 0) {
+    if (allow_pd) {
         etm_create_retention_module(group);
     }
 #endif // ETM_USE_RETENTION_LINK
 
-    chan->fsm = ETM_CHAN_FSM_INIT;
     ESP_LOGD(TAG, "new etm channel (%d,%d) at %p", group_id, chan_id, chan);
     *ret_chan = chan;
     return ESP_OK;
@@ -279,7 +287,9 @@ err:
 esp_err_t esp_etm_del_channel(esp_etm_channel_handle_t chan)
 {
     ESP_RETURN_ON_FALSE(chan, ESP_ERR_INVALID_ARG, TAG, "invalid args");
-    ESP_RETURN_ON_FALSE(chan->fsm == ETM_CHAN_FSM_INIT, ESP_ERR_INVALID_STATE, TAG, "channel is not in init state");
+    etm_chan_fsm_t expected_fsm = ETM_CHAN_FSM_INIT;
+    ESP_RETURN_ON_FALSE(atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, ETM_CHAN_FSM_WAIT),
+                        ESP_ERR_INVALID_STATE, TAG, "channel not in init state");
     etm_group_t *group = chan->group;
     int group_id = group->group_id;
     int chan_id = chan->chan_id;
@@ -296,27 +306,63 @@ esp_err_t esp_etm_del_channel(esp_etm_channel_handle_t chan)
 
 esp_err_t esp_etm_channel_enable(esp_etm_channel_handle_t chan)
 {
-    ESP_RETURN_ON_FALSE(chan, ESP_ERR_INVALID_ARG, TAG, "invalid argument");
-    ESP_RETURN_ON_FALSE(chan->fsm == ETM_CHAN_FSM_INIT, ESP_ERR_INVALID_STATE, TAG, "channel is not in init state");
-    etm_group_t *group = chan->group;
-    etm_ll_enable_channel(group->hal.regs, chan->chan_id);
-    chan->fsm = ETM_CHAN_FSM_ENABLE;
-    return ESP_OK;
+    if (!chan) {
+        return ESP_ERR_INVALID_ARG;
+    }
+    etm_chan_fsm_t expected_fsm = ETM_CHAN_FSM_INIT;
+    if (atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, ETM_CHAN_FSM_WAIT)) {
+        etm_group_t *group = chan->group;
+        // no race condition here even without a lock, because the underlying register is write only and each channel has its own position
+        etm_ll_enable_channel(group->hal.regs, chan->chan_id);
+        // change state to ENABLE
+        atomic_store(&chan->fsm, ETM_CHAN_FSM_ENABLE);
+        return ESP_OK;
+    } else {
+        return ESP_ERR_INVALID_STATE;
+    }
 }
 
 esp_err_t esp_etm_channel_disable(esp_etm_channel_handle_t chan)
 {
-    ESP_RETURN_ON_FALSE(chan, ESP_ERR_INVALID_ARG, TAG, "invalid argument");
-    ESP_RETURN_ON_FALSE(chan->fsm == ETM_CHAN_FSM_ENABLE, ESP_ERR_INVALID_STATE, TAG, "channel not in enable state");
-    etm_group_t *group = chan->group;
-    etm_ll_disable_channel(group->hal.regs, chan->chan_id);
-    chan->fsm = ETM_CHAN_FSM_INIT;
-    return ESP_OK;
+    if (!chan) {
+        return ESP_ERR_INVALID_ARG;
+    }
+    etm_chan_fsm_t expected_fsm = ETM_CHAN_FSM_ENABLE;
+    if (atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, ETM_CHAN_FSM_WAIT)) {
+        etm_group_t *group = chan->group;
+        // no race condition here even without a lock, because the underlying register is write only and each channel has its own position
+        etm_ll_disable_channel(group->hal.regs, chan->chan_id);
+        // change state to INIT
+        atomic_store(&chan->fsm, ETM_CHAN_FSM_INIT);
+        return ESP_OK;
+    } else {
+        return ESP_ERR_INVALID_STATE;
+    }
 }
 
 esp_err_t esp_etm_channel_connect(esp_etm_channel_handle_t chan, esp_etm_event_handle_t event, esp_etm_task_handle_t task)
 {
-    ESP_RETURN_ON_FALSE(chan, ESP_ERR_INVALID_ARG, TAG, "invalid argument");
+    if (!chan) {
+        return ESP_ERR_INVALID_ARG;
+    }
+    bool valid_state = false;
+    etm_chan_fsm_t expected_fsm = ETM_CHAN_FSM_INIT;
+    etm_chan_fsm_t restore_fsm = ETM_CHAN_FSM_INIT;
+    // this function can be called only when the channel is in init or enable state
+    if (atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, ETM_CHAN_FSM_WAIT)) {
+        valid_state = true;
+        restore_fsm = ETM_CHAN_FSM_INIT;
+    } else {
+        expected_fsm = ETM_CHAN_FSM_ENABLE;
+        if (atomic_compare_exchange_strong(&chan->fsm, &expected_fsm, ETM_CHAN_FSM_WAIT)) {
+            valid_state = true;
+            restore_fsm = ETM_CHAN_FSM_ENABLE;
+        }
+    }
+    if (!valid_state) {
+        return ESP_ERR_INVALID_STATE;
+    }
+
     etm_group_t *group = chan->group;
     uint32_t event_id = 0;
     uint32_t task_id = 0;
@@ -332,6 +378,8 @@ esp_err_t esp_etm_channel_connect(esp_etm_channel_handle_t chan, esp_etm_event_h
     etm_ll_channel_set_task(group->hal.regs, chan->chan_id, task_id);
     chan->event = event;
     chan->task = task;
+    // restore the state
+    atomic_store(&chan->fsm, restore_fsm);
     ESP_LOGD(TAG, "event %"PRIu32" => channel %d", event_id, chan->chan_id);
     ESP_LOGD(TAG, "channel %d => task %"PRIu32, chan->chan_id, task_id);
     return ESP_OK;
@@ -357,11 +405,11 @@ esp_err_t esp_etm_dump(FILE *out_stream)
     fprintf(out_stream, "===========ETM Dump Start==========\r\n");
     char line[80];
     size_t len = sizeof(line);
-    for (int i = 0; i < SOC_ETM_GROUPS; i++) {
+    for (int i = 0; i < SOC_ETM_ATTR(INST_NUM); i++) {
         group = etm_acquire_group_handle(i);
         ESP_RETURN_ON_FALSE(group, ESP_ERR_NO_MEM, TAG, "no mem for group (%d)", i);
         etm_hal_context_t *hal = &group->hal;
-        for (int j = 0; j < SOC_ETM_CHANNELS_PER_GROUP; j++) {
+        for (int j = 0; j < SOC_ETM_ATTR(CHANS_PER_INST); j++) {
             bool print_line = true;
             esp_os_enter_critical(&group->spinlock);
             etm_chan = group->chans[j];
@@ -394,3 +442,11 @@ esp_err_t esp_etm_dump(FILE *out_stream)
     fprintf(out_stream, "===========ETM Dump End============\r\n");
     return ESP_OK;
 }
+
+#if CONFIG_ETM_ENABLE_DEBUG_LOG
+__attribute__((constructor))
+static void etm_override_default_log_level(void)
+{
+    esp_log_level_set(TAG, ESP_LOG_VERBOSE);
+}
+#endif
diff --git a/components/esp_hw_support/include/esp_etm.h b/components/esp_hw_support/etm/include/esp_etm.h
similarity index 100%
rename from components/esp_hw_support/include/esp_etm.h
rename to components/esp_hw_support/etm/include/esp_etm.h
diff --git a/components/esp_hw_support/include/esp_private/etm_interface.h b/components/esp_hw_support/etm/include/esp_private/etm_interface.h
similarity index 100%
rename from components/esp_hw_support/include/esp_private/etm_interface.h
rename to components/esp_hw_support/etm/include/esp_private/etm_interface.h
diff --git a/components/esp_hw_support/test_apps/esp_hw_support_unity_tests/main/test_etm_core.c b/components/esp_hw_support/test_apps/esp_hw_support_unity_tests/main/test_etm_core.c
index 4c2f850efd..7454ef2fb7 100644
--- a/components/esp_hw_support/test_apps/esp_hw_support_unity_tests/main/test_etm_core.c
+++ b/components/esp_hw_support/test_apps/esp_hw_support_unity_tests/main/test_etm_core.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2022 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2022-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -10,16 +10,15 @@
 #include "freertos/task.h"
 #include "unity.h"
 #include "esp_etm.h"
-#include "soc/soc_caps.h"
-#include "esp_attr.h"
+#include "soc/etm_periph.h"
 
 TEST_CASE("etm_channel_install_uninstall", "[etm]")
 {
     printf("install etm channels exhaustively\r\n");
-    esp_etm_channel_handle_t etm_chans[SOC_ETM_GROUPS][SOC_ETM_CHANNELS_PER_GROUP];
+    esp_etm_channel_handle_t etm_chans[SOC_ETM_ATTR(INST_NUM)][SOC_ETM_ATTR(CHANS_PER_INST)];
     esp_etm_channel_config_t config = {};
-    for (int i = 0; i < SOC_ETM_GROUPS; i++) {
-        for (int j = 0; j < SOC_ETM_CHANNELS_PER_GROUP; j++) {
+    for (int i = 0; i < SOC_ETM_ATTR(INST_NUM); i++) {
+        for (int j = 0; j < SOC_ETM_ATTR(CHANS_PER_INST); j++) {
             TEST_ESP_OK(esp_etm_new_channel(&config, &etm_chans[i][j]));
         }
         TEST_ESP_ERR(ESP_ERR_NOT_FOUND, esp_etm_new_channel(&config, &etm_chans[0][0]));
@@ -31,8 +30,8 @@ TEST_CASE("etm_channel_install_uninstall", "[etm]")
     TEST_ESP_ERR(ESP_ERR_INVALID_STATE, esp_etm_del_channel(etm_chans[0][0]));
     TEST_ESP_OK(esp_etm_channel_disable(etm_chans[0][0]));
 
-    for (int i = 0; i < SOC_ETM_GROUPS; i++) {
-        for (int j = 0; j < SOC_ETM_CHANNELS_PER_GROUP; j++) {
+    for (int i = 0; i < SOC_ETM_ATTR(INST_NUM); i++) {
+        for (int j = 0; j < SOC_ETM_ATTR(CHANS_PER_INST); j++) {
             TEST_ESP_OK(esp_etm_del_channel(etm_chans[i][j]));
         }
     }
diff --git a/components/soc/esp32c5/etm_periph.c b/components/soc/esp32c5/etm_periph.c
index 0084a78164..ea6b2ab7c4 100644
--- a/components/soc/esp32c5/etm_periph.c
+++ b/components/soc/esp32c5/etm_periph.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
index 54daa898b7..6f1b35c349 100644
--- a/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
@@ -523,18 +523,6 @@ config SOC_GDMA_SUPPORT_WEIGHTED_ARBITRATION
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
-config SOC_ETM_SUPPORT_SLEEP_RETENTION
-    bool
-    default y
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -651,6 +639,10 @@ config SOC_SDM_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_ANA_CMPR_NUM
     int
     default 1
diff --git a/components/soc/esp32c5/include/soc/soc_caps.h b/components/soc/esp32c5/include/soc/soc_caps.h
index 3a7065a0c4..b668b44f73 100644
--- a/components/soc/esp32c5/include/soc/soc_caps.h
+++ b/components/soc/esp32c5/include/soc/soc_caps.h
@@ -204,11 +204,6 @@
 #define SOC_AHB_GDMA_SUPPORT_PSRAM 1
 #define SOC_GDMA_SUPPORT_WEIGHTED_ARBITRATION   1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1   // Support sleep retention
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-C5 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                      1U
@@ -268,6 +263,7 @@
 #define SOC_DEDIC_PERIPH_ALWAYS_ENABLE  (1) /*!< The dedicated GPIO (a.k.a. fast GPIO) is featured by some customized CPU instructions, which is always enabled */
 
 #define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*------------------------- Analog Comparator CAPS ---------------------------*/
 #define SOC_ANA_CMPR_NUM                       (1U)
diff --git a/components/soc/esp32c5/include/soc/soc_caps_full.h b/components/soc/esp32c5/include/soc/soc_caps_full.h
index 63d2d2eec5..d9ce210e7d 100644
--- a/components/soc/esp32c5/include/soc/soc_caps_full.h
+++ b/components/soc/esp32c5/include/soc/soc_caps_full.h
@@ -23,3 +23,7 @@
 /*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
 #define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
 #define _SOC_CAPS_SDM_CHANS_PER_INST              4  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32c6/etm_periph.c b/components/soc/esp32c6/etm_periph.c
index 0084a78164..ea6b2ab7c4 100644
--- a/components/soc/esp32c6/etm_periph.c
+++ b/components/soc/esp32c6/etm_periph.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
index 7e7068ed44..ac19a476db 100644
--- a/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
@@ -459,18 +459,6 @@ config SOC_GDMA_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
-config SOC_ETM_SUPPORT_SLEEP_RETENTION
-    bool
-    default y
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -583,6 +571,10 @@ config SOC_SDM_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_I2C_NUM
     int
     default 2
diff --git a/components/soc/esp32c6/include/soc/soc_caps.h b/components/soc/esp32c6/include/soc/soc_caps.h
index 1ef964369e..c59db3e62d 100644
--- a/components/soc/esp32c6/include/soc/soc_caps.h
+++ b/components/soc/esp32c6/include/soc/soc_caps.h
@@ -183,11 +183,6 @@
 #define SOC_GDMA_SUPPORT_ETM                1  // Support ETM submodule
 #define SOC_GDMA_SUPPORT_SLEEP_RETENTION    1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1   // Support sleep retention
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-C6 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                      1U
@@ -246,6 +241,7 @@
 #define SOC_DEDIC_PERIPH_ALWAYS_ENABLE  (1) /*!< The dedicated GPIO (a.k.a. fast GPIO) is featured by some customized CPU instructions, which is always enabled */
 
 #define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*-------------------------- I2C CAPS ----------------------------------------*/
 // ESP32-C6 has 1 I2C
diff --git a/components/soc/esp32c6/include/soc/soc_caps_full.h b/components/soc/esp32c6/include/soc/soc_caps_full.h
index 63d2d2eec5..d9ce210e7d 100644
--- a/components/soc/esp32c6/include/soc/soc_caps_full.h
+++ b/components/soc/esp32c6/include/soc/soc_caps_full.h
@@ -23,3 +23,7 @@
 /*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
 #define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
 #define _SOC_CAPS_SDM_CHANS_PER_INST              4  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32c61/etm_periph.c b/components/soc/esp32c61/etm_periph.c
index 0084a78164..ea6b2ab7c4 100644
--- a/components/soc/esp32c61/etm_periph.c
+++ b/components/soc/esp32c61/etm_periph.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32c61/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c61/include/soc/Kconfig.soc_caps.in
index 725f96b6e0..5bb67cfc56 100644
--- a/components/soc/esp32c61/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32c61/include/soc/Kconfig.soc_caps.in
@@ -403,14 +403,6 @@ config SOC_GDMA_SUPPORT_WEIGHTED_ARBITRATION
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
 config SOC_ETM_SUPPORT_SLEEP_RETENTION
     bool
     default y
diff --git a/components/soc/esp32c61/include/soc/soc_caps.h b/components/soc/esp32c61/include/soc/soc_caps.h
index a04929dfe7..7abf05d6a9 100644
--- a/components/soc/esp32c61/include/soc/soc_caps.h
+++ b/components/soc/esp32c61/include/soc/soc_caps.h
@@ -161,10 +161,7 @@
 #define SOC_AHB_GDMA_SUPPORT_PSRAM 1
 #define SOC_GDMA_SUPPORT_WEIGHTED_ARBITRATION   1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1   // Support sleep retention
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-C61 has 1 GPIO peripheral
diff --git a/components/soc/esp32c61/include/soc/soc_caps_full.h b/components/soc/esp32c61/include/soc/soc_caps_full.h
index 6ccb00bd76..0f0c3fe392 100644
--- a/components/soc/esp32c61/include/soc/soc_caps_full.h
+++ b/components/soc/esp32c61/include/soc/soc_caps_full.h
@@ -19,3 +19,7 @@
 
 /*--------------------------- Watch Dog ------------------------------------------*/
 #define _SOC_CAPS_WDT_MWDTS_PER_TIMG              1  // Number of main watchdog timers in each Timer Group
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32h2/etm_periph.c b/components/soc/esp32h2/etm_periph.c
index 0084a78164..ea6b2ab7c4 100644
--- a/components/soc/esp32h2/etm_periph.c
+++ b/components/soc/esp32h2/etm_periph.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in b/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
index 31ed4d660a..b7a521cf58 100644
--- a/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
@@ -479,18 +479,6 @@ config SOC_GDMA_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
-config SOC_ETM_SUPPORT_SLEEP_RETENTION
-    bool
-    default y
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -587,6 +575,10 @@ config SOC_SDM_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_ANA_CMPR_NUM
     int
     default 1
diff --git a/components/soc/esp32h2/include/soc/soc_caps.h b/components/soc/esp32h2/include/soc/soc_caps.h
index 8b2b490874..30a8fea465 100644
--- a/components/soc/esp32h2/include/soc/soc_caps.h
+++ b/components/soc/esp32h2/include/soc/soc_caps.h
@@ -206,11 +206,6 @@
 #define SOC_GDMA_SUPPORT_ETM                1  // Support ETM submodule
 #define SOC_GDMA_SUPPORT_SLEEP_RETENTION    1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1   // Support sleep retention
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-H2 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                        1U
@@ -266,6 +261,7 @@
 #define SOC_DEDIC_PERIPH_ALWAYS_ENABLE  (1) /*!< The dedicated GPIO (a.k.a. fast GPIO) is featured by some customized CPU instructions, which is always enabled */
 
 #define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*------------------------- Analog Comparator CAPS ---------------------------*/
 #define SOC_ANA_CMPR_NUM                    (1U)
diff --git a/components/soc/esp32h2/include/soc/soc_caps_full.h b/components/soc/esp32h2/include/soc/soc_caps_full.h
index 63d2d2eec5..d9ce210e7d 100644
--- a/components/soc/esp32h2/include/soc/soc_caps_full.h
+++ b/components/soc/esp32h2/include/soc/soc_caps_full.h
@@ -23,3 +23,7 @@
 /*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
 #define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
 #define _SOC_CAPS_SDM_CHANS_PER_INST              4  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32h21/include/soc/Kconfig.soc_caps.in b/components/soc/esp32h21/include/soc/Kconfig.soc_caps.in
index b0bda3c2bc..6d7f798d0d 100644
--- a/components/soc/esp32h21/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32h21/include/soc/Kconfig.soc_caps.in
@@ -331,14 +331,6 @@ config SOC_GDMA_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -383,6 +375,14 @@ config SOC_GPIO_SUPPORT_HOLD_SINGLE_IO_IN_DSLP
     bool
     default y
 
+config SOC_SDM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_RTCIO_PIN_COUNT
     int
     default 7
diff --git a/components/soc/esp32h21/include/soc/soc_caps.h b/components/soc/esp32h21/include/soc/soc_caps.h
index 4ce2e260e9..ce0ac6b56f 100644
--- a/components/soc/esp32h21/include/soc/soc_caps.h
+++ b/components/soc/esp32h21/include/soc/soc_caps.h
@@ -191,10 +191,6 @@
 // #define SOC_GDMA_SUPPORT_ETM                1  // Support ETM submodule TODO: IDF-11604
 #define SOC_GDMA_SUPPORT_SLEEP_RETENTION    1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-H21 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                           1U
@@ -235,6 +231,9 @@
 // #define SOC_CLOCKOUT_HAS_SOURCE_GATE        (1)
 // #define SOC_GPIO_CLOCKOUT_CHANNEL_NUM       (3)
 
+#define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
+
 /*-------------------------- RTCIO CAPS --------------------------------------*/
 /* No dedicated LP_IOMUX subsystem on ESP32-H21. LP functions are still supported
  * for hold, wake & 32kHz crystal functions - via LP_AON registers */
diff --git a/components/soc/esp32h21/include/soc/soc_caps_full.h b/components/soc/esp32h21/include/soc/soc_caps_full.h
index 6ccb00bd76..d9ce210e7d 100644
--- a/components/soc/esp32h21/include/soc/soc_caps_full.h
+++ b/components/soc/esp32h21/include/soc/soc_caps_full.h
@@ -19,3 +19,11 @@
 
 /*--------------------------- Watch Dog ------------------------------------------*/
 #define _SOC_CAPS_WDT_MWDTS_PER_TIMG              1  // Number of main watchdog timers in each Timer Group
+
+/*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
+#define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
+#define _SOC_CAPS_SDM_CHANS_PER_INST              4  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32h4/etm_periph.c b/components/soc/esp32h4/etm_periph.c
index 82e5ac6ffb..9f44803e7c 100644
--- a/components/soc/esp32h4/etm_periph.c
+++ b/components/soc/esp32h4/etm_periph.c
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32h4/include/soc/Kconfig.soc_caps.in b/components/soc/esp32h4/include/soc/Kconfig.soc_caps.in
index e2c906eba1..efd9d3a9e8 100644
--- a/components/soc/esp32h4/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32h4/include/soc/Kconfig.soc_caps.in
@@ -263,18 +263,6 @@ config SOC_AHB_GDMA_SUPPORT_PSRAM
     bool
     default y
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
-config SOC_ETM_SUPPORT_SLEEP_RETENTION
-    bool
-    default y
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -355,6 +343,10 @@ config SOC_SDM_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_I2C_NUM
     int
     default 2
diff --git a/components/soc/esp32h4/include/soc/soc_caps.h b/components/soc/esp32h4/include/soc/soc_caps.h
index a4691c82e1..adcb3c3017 100644
--- a/components/soc/esp32h4/include/soc/soc_caps.h
+++ b/components/soc/esp32h4/include/soc/soc_caps.h
@@ -198,11 +198,6 @@
 #define SOC_GDMA_SUPPORT_SLEEP_RETENTION    1
 #define SOC_AHB_GDMA_SUPPORT_PSRAM 1
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-H4 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                       1U
@@ -257,6 +252,7 @@
 // #define SOC_DEDIC_PERIPH_ALWAYS_ENABLE  (1) /*!< The dedicated GPIO (a.k.a. fast GPIO) is featured by some customized CPU instructions, which is always enabled */
 
 #define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*-------------------------- I2C CAPS ----------------------------------------*/
 // ESP32-H4 has 2 I2C
diff --git a/components/soc/esp32h4/include/soc/soc_caps_full.h b/components/soc/esp32h4/include/soc/soc_caps_full.h
index 63d2d2eec5..d9ce210e7d 100644
--- a/components/soc/esp32h4/include/soc/soc_caps_full.h
+++ b/components/soc/esp32h4/include/soc/soc_caps_full.h
@@ -23,3 +23,7 @@
 /*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
 #define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
 #define _SOC_CAPS_SDM_CHANS_PER_INST              4  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/esp32p4/etm_periph.c b/components/soc/esp32p4/etm_periph.c
index 5e24359e30..88acc8cc77 100644
--- a/components/soc/esp32p4/etm_periph.c
+++ b/components/soc/esp32p4/etm_periph.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -35,7 +35,7 @@ static const regdma_entries_config_t etm_regdma_entries[] = {
     },
 };
 
-const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS] = {
+const soc_etm_retention_desc_t soc_etm_retention_info[1] = {
     [0] = {
         .module = SLEEP_RETENTION_MODULE_ETM0,
         .regdma_entry_array = etm_regdma_entries,
diff --git a/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in b/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
index 71a741369f..671aca30e2 100644
--- a/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
@@ -635,18 +635,6 @@ config SOC_DMA2D_RX_CHANNELS_PER_GROUP
     int
     default 2
 
-config SOC_ETM_GROUPS
-    int
-    default 1
-
-config SOC_ETM_CHANNELS_PER_GROUP
-    int
-    default 50
-
-config SOC_ETM_SUPPORT_SLEEP_RETENTION
-    bool
-    default y
-
 config SOC_GPIO_PORT
     int
     default 1
@@ -771,6 +759,10 @@ config SOC_SDM_SUPPORT_SLEEP_RETENTION
     bool
     default y
 
+config SOC_ETM_SUPPORT_SLEEP_RETENTION
+    bool
+    default y
+
 config SOC_ANA_CMPR_NUM
     int
     default 2
diff --git a/components/soc/esp32p4/include/soc/soc_caps.h b/components/soc/esp32p4/include/soc/soc_caps.h
index 3650733055..59519b23da 100644
--- a/components/soc/esp32p4/include/soc/soc_caps.h
+++ b/components/soc/esp32p4/include/soc/soc_caps.h
@@ -234,11 +234,6 @@
 #define SOC_DMA2D_TX_CHANNELS_PER_GROUP             (3)  // Number of 2D-DMA TX (OUT) channels in each group
 #define SOC_DMA2D_RX_CHANNELS_PER_GROUP             (2)  // Number of 2D-DMA RX (IN) channels in each group
 
-/*-------------------------- ETM CAPS --------------------------------------*/
-#define SOC_ETM_GROUPS                  1U  // Number of ETM groups
-#define SOC_ETM_CHANNELS_PER_GROUP      50  // Number of ETM channels in the group
-#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1   // Support sleep retention
-
 /*-------------------------- GPIO CAPS ---------------------------------------*/
 // ESP32-P4 has 1 GPIO peripheral
 #define SOC_GPIO_PORT                      1U
@@ -299,6 +294,7 @@
 #define SOC_DEDIC_PERIPH_ALWAYS_ENABLE  (1) /*!< The dedicated GPIO (a.k.a. fast GPIO) is featured by some customized CPU instructions, which is always enabled */
 
 #define SOC_SDM_SUPPORT_SLEEP_RETENTION 1
+#define SOC_ETM_SUPPORT_SLEEP_RETENTION 1
 
 /*------------------------- Analog Comparator CAPS ---------------------------*/
 #define SOC_ANA_CMPR_NUM                       (2)
diff --git a/components/soc/esp32p4/include/soc/soc_caps_full.h b/components/soc/esp32p4/include/soc/soc_caps_full.h
index c1cdc3b38c..44735d0ac2 100644
--- a/components/soc/esp32p4/include/soc/soc_caps_full.h
+++ b/components/soc/esp32p4/include/soc/soc_caps_full.h
@@ -23,3 +23,7 @@
 /*--------------------------- SDM (Sigma-Delta Modulator) ------------------------*/
 #define _SOC_CAPS_SDM_INST_NUM                    1  // Number of SDM instances
 #define _SOC_CAPS_SDM_CHANS_PER_INST              8  // Number of channels in each SDM instance
+
+/*--------------------------- ETM (Event Task Matrix) ----------------------------*/
+#define _SOC_CAPS_ETM_INST_NUM                    1  // Number of ETM instances
+#define _SOC_CAPS_ETM_CHANS_PER_INST              50 // Number of channels in each ETM instance
diff --git a/components/soc/include/soc/etm_periph.h b/components/soc/include/soc/etm_periph.h
index f7168ff717..7b64aba527 100644
--- a/components/soc/include/soc/etm_periph.h
+++ b/components/soc/include/soc/etm_periph.h
@@ -1,31 +1,37 @@
 /*
- * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2025 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
 
 #pragma once
 
-#include "soc/soc_caps.h"
+#include <stdint.h>
+#include "soc/soc_caps_full.h"
 #include "soc/regdma.h"
 
-#if SOC_ETM_SUPPORT_SLEEP_RETENTION
+#if SOC_HAS(PAU)
 #include "soc/retention_periph_defs.h"
 #endif
 
+// helper macros to access module attributes
+#define SOC_ETM_ATTR(_attr)    SOC_MODULE_ATTR(ETM, _attr)
+
 #ifdef __cplusplus
 extern "C" {
 #endif
 
-#if SOC_ETM_SUPPORT_SLEEP_RETENTION
-typedef struct {
-    periph_retention_module_t module;
-    const regdma_entries_config_t *regdma_entry_array;
-    uint32_t array_size;
-} etm_reg_retention_info_t;
+#if SOC_HAS(PAU)
 
-extern const etm_reg_retention_info_t etm_reg_retention_info[SOC_ETM_GROUPS];
-#endif // SOC_ETM_SUPPORT_SLEEP_RETENTION
+typedef struct {
+    periph_retention_module_t module;                  // ID of the ETM as a retention module
+    const regdma_entries_config_t *regdma_entry_array; // Array of regdma entries for retention
+    uint32_t array_size;                               // Size of the regdma_entry_array
+} soc_etm_retention_desc_t;
+
+extern const soc_etm_retention_desc_t soc_etm_retention_info[SOC_ETM_ATTR(INST_NUM)];
+
+#endif // SOC_HAS(PAU)
 
 #ifdef __cplusplus
 }
diff --git a/docs/docs_not_updated/esp32h4.txt b/docs/docs_not_updated/esp32h4.txt
index 47566d3f39..ea29f01fc1 100644
--- a/docs/docs_not_updated/esp32h4.txt
+++ b/docs/docs_not_updated/esp32h4.txt
@@ -146,7 +146,6 @@ api-reference/peripherals/usb_host.rst
 api-reference/peripherals/camera_driver.rst
 api-reference/peripherals/adc_oneshot.rst
 api-reference/peripherals/twai.rst
-api-reference/peripherals/etm.rst
 api-reference/peripherals/sdspi_share.rst
 api-reference/peripherals/ana_cmpr.rst
 api-reference/peripherals/adc_continuous.rst
@@ -175,7 +174,6 @@ api-reference/peripherals/spi_flash/spi_flash_concurrency.rst
 api-reference/peripherals/spi_flash/spi_flash_override_driver.rst
 api-reference/peripherals/spi_flash/spi_flash_optional_feature.rst
 api-reference/peripherals/spi_flash/spi_flash_idf_vs_rom.rst
-api-reference/peripherals/sdm.rst
 api-reference/peripherals/sdmmc_host.rst
 api-reference/peripherals/lcd/i80_lcd.rst
 api-reference/peripherals/lcd/index.rst
diff --git a/docs/doxygen/Doxyfile b/docs/doxygen/Doxyfile
index b4b575fb29..6c0db67ea3 100644
--- a/docs/doxygen/Doxyfile
+++ b/docs/doxygen/Doxyfile
@@ -165,12 +165,12 @@ INPUT = \
     $(PROJECT_PATH)/components/esp_http_server/include/esp_http_server.h \
     $(PROJECT_PATH)/components/esp_https_ota/include/esp_https_ota.h \
     $(PROJECT_PATH)/components/esp_https_server/include/esp_https_server.h \
+    $(PROJECT_PATH)/components/esp_hw_support/etm/include/esp_etm.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_clk_tree.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_async_memcpy.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_chip_info.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_cpu.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_crc.h \
-    $(PROJECT_PATH)/components/esp_hw_support/include/esp_etm.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_intr_alloc.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_intr_types.h \
     $(PROJECT_PATH)/components/esp_hw_support/include/esp_mac.h \
diff --git a/docs/en/api-reference/peripherals/etm.rst b/docs/en/api-reference/peripherals/etm.rst
index 411e1d1d13..89f16d411e 100644
--- a/docs/en/api-reference/peripherals/etm.rst
+++ b/docs/en/api-reference/peripherals/etm.rst
@@ -148,11 +148,11 @@ When power management is enabled, i.e., :ref:`CONFIG_PM_ENABLE` is on, the syste
 Thread Safety
 ^^^^^^^^^^^^^
 
-The factory functions like :cpp:func:`esp_etm_new_channel` and :cpp:func:`gpio_new_etm_task` are guaranteed to be thread-safe by the driver, which means, you can call them from different RTOS tasks without protection by extra locks.
+The ETM core driver is thread-safe.
 
-No functions are allowed to run within the ISR environment.
-
-Other functions that take :cpp:type:`esp_etm_channel_handle_t`, :cpp:type:`esp_etm_task_handle_t` and :cpp:type:`esp_etm_event_handle_t` as the first positional parameter, are not treated as thread-safe, which means you should avoid calling them from multiple tasks.
+- Factory functions (for example, :cpp:func:`esp_etm_new_channel`, :cpp:func:`gpio_new_etm_task`, and other ``*_new_etm_*`` creators) are thread-safe and can be called from different RTOS tasks concurrently.
+- Channel control APIs (for example, :cpp:func:`esp_etm_channel_connect`, :cpp:func:`esp_etm_channel_enable`, :cpp:func:`esp_etm_channel_disable`, :cpp:func:`esp_etm_del_channel`) are also thread-safe. Concurrent operations on different channels are safe. Concurrent operations on the same channel are serialized internally; if an operation is incompatible with the current channel state, it will return :c:macro:`ESP_ERR_INVALID_STATE`.
+- No functions are allowed to run within the ISR environment.
 
 .. _etm-kconfig-options:
 
diff --git a/docs/zh_CN/api-reference/peripherals/etm.rst b/docs/zh_CN/api-reference/peripherals/etm.rst
index 1d2e9350a7..0f6127a356 100644
--- a/docs/zh_CN/api-reference/peripherals/etm.rst
+++ b/docs/zh_CN/api-reference/peripherals/etm.rst
@@ -148,11 +148,11 @@ ETM 通道分析
 线程安全
 ^^^^^^^^^^^^^
 
-ETM 驱动程序会确保工厂函数 :cpp:func:`esp_etm_new_channel` 和 :cpp:func:`gpio_new_etm_task` 的线程安全。使用时，可以直接从不同的 RTOS 任务中调用此类函数，无需额外锁保护。
+ETM 核心驱动程序具备线程安全性。
 
-在 ISR 环境中，不支持运行任何函数。
-
-其他以 :cpp:type:`esp_etm_channel_handle_t`、:cpp:type:`esp_etm_task_handle_t` 和 :cpp:type:`esp_etm_event_handle_t` 作为首个位置参数的函数，则非线程安全，应避免从不同任务中调用此类函数。
+- 工厂函数（如 :cpp:func:`esp_etm_new_channel` :cpp:func:`gpio_new_etm_task` 以及其他 ``*_new_etm_*`` 创建函数）均为线程安全，可在不同 RTOS 任务中并发调用，无需担心资源冲突。
+- 通道控制相关 API（如 :cpp:func:`esp_etm_channel_connect`， :cpp:func:`esp_etm_channel_enable`， :cpp:func:`esp_etm_channel_disable`， :cpp:func:`esp_etm_del_channel`）同样支持线程安全。针对不同通道的并发操作是安全的；若对同一通道进行并发操作，驱动会自动进行内部序列化。如果操作与当前通道状态不兼容，则会返回 :c:macro:`ESP_ERR_INVALID_STATE` 错误。
+- 所有 ETM API 均不允许在中断服务程序（ISR）环境下调用。
 
 .. _etm-kconfig-options:
 
diff --git a/tools/mocks/esp_hw_support/include/esp_etm.h b/tools/mocks/esp_hw_support/include/esp_etm.h
deleted file mode 100644
index 38963482db..0000000000
--- a/tools/mocks/esp_hw_support/include/esp_etm.h
+++ /dev/null
@@ -1,35 +0,0 @@
-/*
- * SPDX-FileCopyrightText: 2022 Espressif Systems (Shanghai) CO LTD
- *
- * SPDX-License-Identifier: Apache-2.0
- */
-
-/**
- * NOTE: this is not the original header file from the esp_hw_support component.
- * It is a stripped-down copy to support mocking.
- */
-
-#pragma once
-
-#ifdef __cplusplus
-extern "C" {
-#endif
-
-/**
- * @brief ETM channel handle
- */
-typedef struct esp_etm_channel_t *esp_etm_channel_handle_t;
-
-/**
- * @brief ETM event handle
- */
-typedef struct esp_etm_event_t *esp_etm_event_handle_t;
-
-/**
- * @brief ETM task handle
- */
-typedef struct esp_etm_task_t *esp_etm_task_handle_t;
-
-#ifdef __cplusplus
-}
-#endif
diff --git a/tools/mocks/esp_timer/CMakeLists.txt b/tools/mocks/esp_timer/CMakeLists.txt
index 39fe5a78f4..163d85338d 100644
--- a/tools/mocks/esp_timer/CMakeLists.txt
+++ b/tools/mocks/esp_timer/CMakeLists.txt
@@ -3,11 +3,12 @@
 message(STATUS "building ESP TIMER MOCKS")
 
 idf_component_get_property(original_esp_timer_dir esp_timer COMPONENT_OVERRIDEN_DIR)
+idf_component_get_property(original_esp_hw_support_dir esp_hw_support COMPONENT_OVERRIDEN_DIR)
+if(NOT original_esp_hw_support_dir)
+    idf_component_get_property(original_esp_hw_support_dir esp_hw_support COMPONENT_DIR)
+endif()
 
-set(include_dirs
-    "${original_esp_timer_dir}/include"
-    "${CMAKE_CURRENT_SOURCE_DIR}/../esp_hw_support/include")
-
-idf_component_mock(INCLUDE_DIRS ${include_dirs}
-    REQUIRES esp_common
-    MOCK_HEADER_FILES ${original_esp_timer_dir}/include/esp_timer.h)
+idf_component_mock(INCLUDE_DIRS "${original_esp_timer_dir}/include"
+                                "${original_esp_hw_support_dir}/etm/include"
+                   REQUIRES esp_common
+                   MOCK_HEADER_FILES ${original_esp_timer_dir}/include/esp_timer.h)