diff --git a/components/esp_driver_touch_sens/common/touch_sens_private.h b/components/esp_driver_touch_sens/common/touch_sens_private.h
index 325acb775e..48b671bb3a 100644
--- a/components/esp_driver_touch_sens/common/touch_sens_private.h
+++ b/components/esp_driver_touch_sens/common/touch_sens_private.h
@@ -67,6 +67,7 @@ struct touch_sensor_s {
     touch_channel_handle_t  ch[SOC_TOUCH_SENSOR_NUM];   /*!< Touch sensor channel handles, will be NULL if the channel is not registered */
     uint32_t                chan_mask;                  /*!< Enabled channel mask, corresponding bit will be set if the channel is registered */
     uint32_t                src_freq_hz;                /*!< Source clock frequency */
+    uint32_t                interval_freq_hz;           /*!< Frequency of the interval clock */
     intr_handle_t           intr_handle;                /*!< Interrupt handle */
     touch_event_callbacks_t cbs;                        /*!< Event callbacks */
     touch_channel_handle_t  deep_slp_chan;              /*!< The configured channel for depp sleep, will be NULL if not enable the deep sleep */
diff --git a/components/esp_driver_touch_sens/hw_ver3/touch_version_specific.c b/components/esp_driver_touch_sens/hw_ver3/touch_version_specific.c
index f9d44a75f4..a5a338dc27 100644
--- a/components/esp_driver_touch_sens/hw_ver3/touch_version_specific.c
+++ b/components/esp_driver_touch_sens/hw_ver3/touch_version_specific.c
@@ -147,11 +147,18 @@ static esp_err_t s_touch_convert_to_hal_config(touch_sensor_handle_t sens_handle
                             TAG, "get clock frequency failed");
         ESP_LOGD(TAG, "touch rtc clock source: RTC_FAST, frequency: %"PRIu32" Hz", sens_handle->src_freq_hz);
     }
+    if (!sens_handle->interval_freq_hz) {
+        ESP_RETURN_ON_ERROR(esp_clk_tree_src_get_freq_hz(SOC_MOD_CLK_RTC_SLOW, ESP_CLK_TREE_SRC_FREQ_PRECISION_CACHED, &sens_handle->interval_freq_hz),
+                            TAG, "get interval clock frequency failed");
+    }
 
     uint32_t src_freq_hz = sens_handle->src_freq_hz;
     uint32_t src_freq_mhz = src_freq_hz / 1000000;
+    uint32_t interval_freq_mhz = sens_handle->interval_freq_hz / 1000000;
     hal_cfg->power_on_wait_ticks = (uint32_t)sens_cfg->power_on_wait_us * src_freq_mhz;
-    hal_cfg->meas_interval_ticks = (uint32_t)(sens_cfg->meas_interval_us * src_freq_mhz);
+    hal_cfg->power_on_wait_ticks = hal_cfg->power_on_wait_ticks > TOUCH_LL_PAD_MEASURE_WAIT_MAX ?
+                                   TOUCH_LL_PAD_MEASURE_WAIT_MAX : hal_cfg->power_on_wait_ticks;
+    hal_cfg->meas_interval_ticks = (uint32_t)(sens_cfg->meas_interval_us * interval_freq_mhz);
     hal_cfg->timeout_ticks = (uint32_t)sens_cfg->max_meas_time_us * src_freq_mhz;
     ESP_RETURN_ON_FALSE(hal_cfg->timeout_ticks <= TOUCH_LL_TIMEOUT_MAX, ESP_ERR_INVALID_ARG, TAG,
                         "max_meas_time_ms should within %"PRIu32, TOUCH_LL_TIMEOUT_MAX / src_freq_mhz);
diff --git a/components/esp_driver_touch_sens/test_apps/touch_sens/main/test_touch_sens_common.c b/components/esp_driver_touch_sens/test_apps/touch_sens/main/test_touch_sens_common.c
index b93c277b0e..c5c0adc3ce 100644
--- a/components/esp_driver_touch_sens/test_apps/touch_sens/main/test_touch_sens_common.c
+++ b/components/esp_driver_touch_sens/test_apps/touch_sens/main/test_touch_sens_common.c
@@ -52,8 +52,8 @@ TEST_CASE("touch_sens_install_uninstall_test", "[touch]")
         TEST_ESP_OK(touch_sensor_new_channel(touch, i + TOUCH_MIN_CHAN_ID, &s_chan_cfg, &touch_chan[i]));
     }
     touch_channel_handle_t fault_chan = NULL;
-    TEST_ASSERT(touch_sensor_new_channel(touch, TOUCH_TOTAL_CHAN_NUM, &s_chan_cfg, &fault_chan) == ESP_ERR_INVALID_ARG);
-    TEST_ASSERT(touch_sensor_new_channel(touch, 0, &s_chan_cfg, &fault_chan) == ESP_ERR_INVALID_STATE);
+    TEST_ASSERT(touch_sensor_new_channel(touch, TOUCH_TOTAL_CHAN_NUM + TOUCH_MIN_CHAN_ID, &s_chan_cfg, &fault_chan) == ESP_ERR_INVALID_ARG);
+    TEST_ASSERT(touch_sensor_new_channel(touch, TOUCH_MIN_CHAN_ID, &s_chan_cfg, &fault_chan) == ESP_ERR_INVALID_STATE);
 
     TEST_ESP_OK(touch_sensor_enable(touch));
     TEST_ASSERT(touch_sensor_del_channel(touch_chan[0]) == ESP_ERR_INVALID_STATE);