diff --git a/components/driver/touch_sensor/esp32/touch_sensor.c b/components/driver/touch_sensor/esp32/touch_sensor.c
index 8731a080da..686207817f 100644
--- a/components/driver/touch_sensor/esp32/touch_sensor.c
+++ b/components/driver/touch_sensor/esp32/touch_sensor.c
@@ -512,7 +512,9 @@ esp_err_t touch_pad_filter_delete(void)
     esp_err_t ret = ESP_OK;
     xSemaphoreTake(rtc_touch_mux, portMAX_DELAY);
     if (s_touch_pad_filter->timer) {
-        ESP_GOTO_ON_ERROR(esp_timer_stop(s_touch_pad_filter->timer), err, TOUCH_TAG, "failed to stop the timer");
+        if (esp_timer_is_active(s_touch_pad_filter->timer)) {
+            ESP_GOTO_ON_ERROR(esp_timer_stop(s_touch_pad_filter->timer), err, TOUCH_TAG, "failed to stop the timer");
+        }
         ESP_GOTO_ON_ERROR(esp_timer_delete(s_touch_pad_filter->timer), err, TOUCH_TAG, "failed to delete the timer");
         s_touch_pad_filter->timer = NULL;
     }
diff --git a/components/hal/esp32/include/hal/touch_sensor_ll.h b/components/hal/esp32/include/hal/touch_sensor_ll.h
index 455626b004..53929a20bf 100644
--- a/components/hal/esp32/include/hal/touch_sensor_ll.h
+++ b/components/hal/esp32/include/hal/touch_sensor_ll.h
@@ -681,8 +681,8 @@ static inline void touch_ll_stop_fsm(void)
  */
 static inline void touch_ll_start_sw_meas(void)
 {
-    SENS.sar_touch_ctrl2.touch_start_en = 0;
     SENS.sar_touch_ctrl2.touch_start_en = 1;
+    SENS.sar_touch_ctrl2.touch_start_en = 0;
 }
 
 /**
diff --git a/components/hal/esp32s2/include/hal/touch_sensor_ll.h b/components/hal/esp32s2/include/hal/touch_sensor_ll.h
index a5e38e8982..2ce086cc6f 100644
--- a/components/hal/esp32s2/include/hal/touch_sensor_ll.h
+++ b/components/hal/esp32s2/include/hal/touch_sensor_ll.h
@@ -1061,8 +1061,8 @@ static inline bool touch_ll_get_fsm_state(void)
  */
 static inline void touch_ll_start_sw_meas(void)
 {
-    RTCCNTL.touch_ctrl2.touch_start_en = 0;
     RTCCNTL.touch_ctrl2.touch_start_en = 1;
+    RTCCNTL.touch_ctrl2.touch_start_en = 0;
 }
 
 /**
diff --git a/components/hal/esp32s3/include/hal/touch_sensor_ll.h b/components/hal/esp32s3/include/hal/touch_sensor_ll.h
index 193950ee70..d57129e5c0 100644
--- a/components/hal/esp32s3/include/hal/touch_sensor_ll.h
+++ b/components/hal/esp32s3/include/hal/touch_sensor_ll.h
@@ -1086,8 +1086,8 @@ static inline bool touch_ll_get_fsm_state(void)
  */
 static inline void touch_ll_start_sw_meas(void)
 {
-    RTCCNTL.touch_ctrl2.touch_start_en = 0;
     RTCCNTL.touch_ctrl2.touch_start_en = 1;
+    RTCCNTL.touch_ctrl2.touch_start_en = 0;
 }
 
 /**