diff --git a/components/esp_driver_tsens/CMakeLists.txt b/components/esp_driver_tsens/CMakeLists.txt
index b202242c7f..be0e65609f 100644
--- a/components/esp_driver_tsens/CMakeLists.txt
+++ b/components/esp_driver_tsens/CMakeLists.txt
@@ -3,6 +3,9 @@ set(priv_req efuse)
 set(public_include "include")
 if(CONFIG_SOC_TEMP_SENSOR_SUPPORTED)
     list(APPEND srcs "src/temperature_sensor.c")
+    if(CONFIG_SOC_TEMPERATURE_SENSOR_SUPPORT_ETM)
+        list(APPEND srcs "src/temperature_sensor_etm.c")
+    endif()
 endif()
 
 idf_component_register(SRCS ${srcs}
diff --git a/components/esp_driver_tsens/include/driver/temperature_sensor_etm.h b/components/esp_driver_tsens/include/driver/temperature_sensor_etm.h
new file mode 100644
index 0000000000..34c395a22f
--- /dev/null
+++ b/components/esp_driver_tsens/include/driver/temperature_sensor_etm.h
@@ -0,0 +1,64 @@
+/*
+ * SPDX-FileCopyrightText: 2024 Espressif Systems (Shanghai) CO LTD
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#pragma once
+
+#include "esp_err.h"
+#include "esp_etm.h"
+#include "driver/temperature_sensor.h"
+#include "hal/temperature_sensor_types.h"
+
+#ifdef __cplusplus
+extern "C" {
+#endif
+
+/**
+ * @brief Temperature Sensor ETM event configuration
+ */
+typedef struct {
+    temperature_sensor_etm_event_type_t event_type;     /*!< Temperature Sensor ETM event type */
+} temperature_sensor_etm_event_config_t;
+
+/**
+ * @brief Get the ETM event for Temperature Sensor
+ *
+ * @note The created ETM event object can be deleted later by calling `esp_etm_del_event`
+ *
+ * @param[in] tsens Temperature Sensor handle, allocated by `temperature_sensor_install()`
+ * @param[in] config Temperature Sensor ETM event configuration
+ * @param[out] out_event Returned ETM event handle
+ * @return
+ *      - ESP_OK: Get ETM event successfully
+ *      - ESP_ERR_INVALID_ARG: Get ETM event failed because of invalid argument
+ *      - ESP_FAIL: Get ETM event failed because of other error
+ */
+esp_err_t temperature_sensor_new_etm_event(temperature_sensor_handle_t tsens, const temperature_sensor_etm_event_config_t *config, esp_etm_event_handle_t *out_event);
+
+/**
+ * @brief Temperature Sensor ETM task configuration
+ */
+typedef struct {
+    temperature_sensor_etm_task_type_t task_type;    /*!< Temperature Sensor ETM task type */
+} temperature_sensor_etm_task_config_t;
+
+/**
+ * @brief Get the ETM task for Temperature Sensor
+ *
+ * @note The created ETM task object can be deleted later by calling `esp_etm_del_task`
+ *
+ * @param[in] tsens Temperature Sensor, allocated by `temperature_sensor_install()`
+ * @param[in] config Temperature Sensor ETM task configuration
+ * @param[out] out_task Returned ETM task handle
+ * @return
+ *      - ESP_OK: Get ETM task successfully
+ *      - ESP_ERR_INVALID_ARG: Get ETM task failed because of invalid argument
+ *      - ESP_FAIL: Get ETM task failed because of other error
+ */
+esp_err_t temperature_sensor_new_etm_task(temperature_sensor_handle_t tsens, const temperature_sensor_etm_task_config_t *config, esp_etm_task_handle_t *out_task);
+
+#ifdef __cplusplus
+}
+#endif
diff --git a/components/esp_driver_tsens/src/temperature_sensor.c b/components/esp_driver_tsens/src/temperature_sensor.c
index 22faa43d76..584f15e364 100644
--- a/components/esp_driver_tsens/src/temperature_sensor.c
+++ b/components/esp_driver_tsens/src/temperature_sensor.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2022-2023 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2022-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -103,9 +103,12 @@ esp_err_t temperature_sensor_install(const temperature_sensor_config_t *tsens_co
     ESP_RETURN_ON_FALSE((s_tsens_attribute_copy == NULL), ESP_ERR_INVALID_STATE, TAG, "Already installed");
     temperature_sensor_handle_t tsens = NULL;
     tsens = (temperature_sensor_obj_t *) heap_caps_calloc(1, sizeof(temperature_sensor_obj_t), MALLOC_CAP_DEFAULT);
-    ESP_GOTO_ON_FALSE(tsens != NULL, ESP_ERR_NO_MEM, err, TAG, "no mem for temp sensor");
+    ESP_RETURN_ON_FALSE((tsens != NULL), ESP_ERR_NO_MEM, TAG, "no mem for temp sensor");
     tsens->clk_src = tsens_config->clk_src;
 
+    temperature_sensor_power_acquire();
+    temperature_sensor_ll_clk_sel(tsens->clk_src);
+
     ESP_GOTO_ON_ERROR(temperature_sensor_attribute_table_sort(), err, TAG, "Table sort failed");
     ESP_GOTO_ON_ERROR(temperature_sensor_choose_best_range(tsens, tsens_config), err, TAG, "Cannot select the correct range");
 
@@ -140,6 +143,7 @@ esp_err_t temperature_sensor_uninstall(temperature_sensor_handle_t tsens)
         ESP_RETURN_ON_ERROR(esp_intr_free(tsens->temp_sensor_isr_handle), TAG, "uninstall interrupt service failed");
     }
 #endif // SOC_TEMPERATURE_SENSOR_INTR_SUPPORT
+    temperature_sensor_power_release();
 
     free(tsens);
     return ESP_OK;
@@ -175,8 +179,6 @@ esp_err_t temperature_sensor_enable(temperature_sensor_handle_t tsens)
     temperature_sensor_ll_sample_enable(true);
 #endif // SOC_TEMPERATURE_SENSOR_INTR_SUPPORT
 
-    temperature_sensor_ll_clk_sel(tsens->clk_src);
-    temperature_sensor_power_acquire();
     // After enabling/reseting the temperature sensor,
     // the output value gradually approaches the true temperature
     // value as the measurement time increases. 300us is recommended.
@@ -190,7 +192,6 @@ esp_err_t temperature_sensor_disable(temperature_sensor_handle_t tsens)
     ESP_RETURN_ON_FALSE(tsens, ESP_ERR_INVALID_ARG, TAG, "invalid argument");
     ESP_RETURN_ON_FALSE(tsens->fsm == TEMP_SENSOR_FSM_ENABLE, ESP_ERR_INVALID_STATE, TAG, "tsens not enabled yet");
 
-    temperature_sensor_power_release();
 #if SOC_TEMPERATURE_SENSOR_INTR_SUPPORT
     temperature_sensor_ll_wakeup_enable(false);
     temperature_sensor_ll_sample_enable(false);
diff --git a/components/esp_driver_tsens/src/temperature_sensor_etm.c b/components/esp_driver_tsens/src/temperature_sensor_etm.c
new file mode 100644
index 0000000000..b6059e5092
--- /dev/null
+++ b/components/esp_driver_tsens/src/temperature_sensor_etm.c
@@ -0,0 +1,96 @@
+/*
+ * SPDX-FileCopyrightText: 2024 Espressif Systems (Shanghai) CO LTD
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#include "sdkconfig.h"
+#include "esp_err.h"
+#include "esp_etm.h"
+#include "esp_check.h"
+#include "esp_private/etm_interface.h"
+#include "hal/temperature_sensor_ll.h"
+#include "driver/temperature_sensor_etm.h"
+#include "esp_heap_caps.h"
+#if CONFIG_ETM_ENABLE_DEBUG_LOG
+// The local log level must be defined before including esp_log.h
+// Set the maximum log level for this source file
+#define LOG_LOCAL_LEVEL ESP_LOG_DEBUG
+#endif
+#include "esp_log.h"
+
+#define ETM_MEM_ALLOC_CAPS   MALLOC_CAP_DEFAULT
+
+static const char *TAG = "tsens-etm";
+
+static esp_err_t temperature_sensor_del_etm_event(esp_etm_event_t *event)
+{
+    free(event);
+    return ESP_OK;
+}
+
+static esp_err_t temperature_sensor_del_etm_task(esp_etm_task_t *task)
+{
+    free(task);
+    return ESP_OK;
+}
+
+esp_err_t temperature_sensor_new_etm_event(temperature_sensor_handle_t tsens, const temperature_sensor_etm_event_config_t *config, esp_etm_event_handle_t *out_event)
+{
+#if CONFIG_ETM_ENABLE_DEBUG_LOG
+    esp_log_level_set(TAG, ESP_LOG_DEBUG);
+#endif
+    esp_etm_event_t *event = NULL;
+    esp_err_t ret = ESP_OK;
+    ESP_GOTO_ON_FALSE(tsens && config && out_event, ESP_ERR_INVALID_ARG, err, TAG, "invalid argument");
+    ESP_GOTO_ON_FALSE(config->event_type < TEMPERATURE_SENSOR_EVENT_MAX, ESP_ERR_INVALID_ARG, err, TAG, "invalid event type");
+    event = heap_caps_calloc(1, sizeof(esp_etm_event_t), ETM_MEM_ALLOC_CAPS);
+    ESP_GOTO_ON_FALSE(event, ESP_ERR_NO_MEM, err, TAG, "no memory for ETM event");
+
+    uint32_t event_id = TEMPERATURE_SENSOR_LL_ETM_EVENT_TABLE(config->event_type);
+    ESP_GOTO_ON_FALSE(event_id != 0, ESP_ERR_NOT_SUPPORTED, err, TAG, "not supported event type");
+
+    // fill the ETM event object
+    event->event_id = event_id;
+    event->trig_periph = ETM_TRIG_PERIPH_TSENS;
+    event->del = temperature_sensor_del_etm_event;
+    ESP_LOGD(TAG, "new event @%p, event_id=%"PRIu32, event, event_id);
+    *out_event = event;
+    return ESP_OK;
+
+err:
+    if (event) {
+        temperature_sensor_del_etm_event(event);
+    }
+    return ret;
+}
+
+esp_err_t temperature_sensor_new_etm_task(temperature_sensor_handle_t tsens, const temperature_sensor_etm_task_config_t *config, esp_etm_task_handle_t *out_task)
+{
+#if CONFIG_ETM_ENABLE_DEBUG_LOG
+    esp_log_level_set(TAG, ESP_LOG_DEBUG);
+#endif
+    esp_etm_task_t *task = NULL;
+    esp_err_t ret = ESP_OK;
+    ESP_GOTO_ON_FALSE(tsens && config && out_task, ESP_ERR_INVALID_ARG, err, TAG, "invalid argument");
+    ESP_GOTO_ON_FALSE(config->task_type < TEMPERATURE_SENSOR_TASK_MAX, ESP_ERR_INVALID_ARG, err, TAG, "invalid task type");
+    task = heap_caps_calloc(1, sizeof(esp_etm_task_t), ETM_MEM_ALLOC_CAPS);
+    ESP_GOTO_ON_FALSE(task, ESP_ERR_NO_MEM, err, TAG, "no memory for ETM task");
+
+    uint32_t task_id = TEMPERATURE_SENSOR_LL_ETM_TASK_TABLE(config->task_type);
+    ESP_GOTO_ON_FALSE(task_id != 0, ESP_ERR_NOT_SUPPORTED, err, TAG, "not supported task type");
+
+    // fill the ETM task object
+    task->task_id = task_id;
+    task->trig_periph = ETM_TRIG_PERIPH_TSENS;
+    task->del = temperature_sensor_del_etm_task;
+    ESP_LOGD(TAG, "new task @%p, task_id=%"PRIu32, task, task_id);
+    *out_task = task;
+    return ESP_OK;
+
+err:
+    if (task) {
+        temperature_sensor_del_etm_task(task);
+    }
+    return ret;
+}
diff --git a/components/esp_driver_tsens/test_apps/temperature_sensor/main/CMakeLists.txt b/components/esp_driver_tsens/test_apps/temperature_sensor/main/CMakeLists.txt
index e250ba0ae4..5d45e0615a 100644
--- a/components/esp_driver_tsens/test_apps/temperature_sensor/main/CMakeLists.txt
+++ b/components/esp_driver_tsens/test_apps/temperature_sensor/main/CMakeLists.txt
@@ -2,8 +2,12 @@ set(srcs "test_app_main.c"
          "test_temperature_sensor.c"
          "test_temperature_phy.c")
 
+if(CONFIG_SOC_TEMPERATURE_SENSOR_SUPPORT_ETM)
+    list(APPEND srcs "test_temperature_etm.c")
+endif()
+
 # In order for the cases defined by `TEST_CASE` to be linked into the final elf,
 # the component can be registered as WHOLE_ARCHIVE
 idf_component_register(SRCS ${srcs}
-                       PRIV_REQUIRES unity esp_wifi test_utils nvs_flash esp_driver_tsens
+                       PRIV_REQUIRES unity esp_wifi test_utils nvs_flash esp_driver_tsens esp_driver_gpio
                        WHOLE_ARCHIVE)
diff --git a/components/esp_driver_tsens/test_apps/temperature_sensor/main/test_temperature_etm.c b/components/esp_driver_tsens/test_apps/temperature_sensor/main/test_temperature_etm.c
new file mode 100644
index 0000000000..d036d4ef9c
--- /dev/null
+++ b/components/esp_driver_tsens/test_apps/temperature_sensor/main/test_temperature_etm.c
@@ -0,0 +1,91 @@
+/*
+ * SPDX-FileCopyrightText: 2024 Espressif Systems (Shanghai) CO LTD
+ *
+ * SPDX-License-Identifier: Apache-2.0
+ */
+
+#include <stdio.h>
+#include <inttypes.h>
+#include "unity.h"
+#include "unity_test_utils.h"
+#include "esp_attr.h"
+#include "driver/gpio_etm.h"
+#include "driver/gpio.h"
+#include "driver/temperature_sensor_etm.h"
+#include "driver/temperature_sensor.h"
+#include "soc/soc_etm_struct.h"
+
+// To run this example, you need a facility that can make the temperature change
+// on board. Like a heat gun.
+// Then after the temperature meet the threshold, you can see the gpio level changes
+// from 0 to 1 on logic analyzer or oscilloscope.
+TEST_CASE("temperature sensor alarm cause gpio pull up", "[etm]")
+{
+    const uint32_t output_gpio = 5;
+    // temperature sensor alarm ---> ETM channel A ---> GPIO level to high
+    printf("allocate etm channel\r\n");
+    esp_etm_channel_config_t etm_config = {};
+    esp_etm_channel_handle_t etm_channel_a;
+    TEST_ESP_OK(esp_etm_new_channel(&etm_config, &etm_channel_a));
+
+    printf("allocate GPIO etm task\r\n");
+    esp_etm_task_handle_t gpio_task = NULL;
+    gpio_etm_task_config_t gpio_task_config = {
+        .action = GPIO_ETM_TASK_ACTION_SET,
+    };
+    TEST_ESP_OK(gpio_new_etm_task(&gpio_task_config, &gpio_task));
+    // set gpio number for the gpio etm primitives
+    TEST_ESP_OK(gpio_etm_task_add_gpio(gpio_task, output_gpio));
+
+    printf("initialize gpio\r\n");
+    gpio_set_level(output_gpio, 0);
+    gpio_config_t task_gpio_config = {
+        .intr_type = GPIO_INTR_DISABLE,
+        .mode = GPIO_MODE_OUTPUT,
+        .pin_bit_mask = 1ULL << output_gpio,
+    };
+    TEST_ESP_OK(gpio_config(&task_gpio_config));
+
+    float tsens_out;
+    temperature_sensor_config_t temp_sensor = TEMPERATURE_SENSOR_CONFIG_DEFAULT(10, 50);
+    temperature_sensor_handle_t temp_handle = NULL;
+    TEST_ESP_OK(temperature_sensor_install(&temp_sensor, &temp_handle));
+
+    temperature_sensor_abs_threshold_config_t threshold_cfg = {
+        .high_threshold = 50,
+        .low_threshold = -10,
+    };
+    TEST_ESP_OK(temperature_sensor_set_absolute_threshold(temp_handle, &threshold_cfg));
+    TEST_ESP_OK(temperature_sensor_enable(temp_handle));
+    printf("Temperature sensor started\n");
+
+    temperature_sensor_etm_event_config_t tsens_etm_event = {
+        .event_type = TEMPERATURE_SENSOR_EVENT_OVER_LIMIT,
+    };
+
+    esp_etm_event_handle_t tsens_evt;
+
+    TEST_ESP_OK(temperature_sensor_new_etm_event(temp_handle, &tsens_etm_event, &tsens_evt));
+
+    printf("connect event and task to the channel\r\n");
+    TEST_ESP_OK(esp_etm_channel_connect(etm_channel_a, tsens_evt, gpio_task));
+
+    printf("enable etm channel\r\n");
+    TEST_ESP_OK(esp_etm_channel_enable(etm_channel_a));
+
+    uint32_t cnt = 20;
+    while (cnt--) {
+        TEST_ESP_OK(temperature_sensor_get_celsius(temp_handle, &tsens_out));
+        printf("Temperature out celsius %f°C\n", tsens_out);
+        vTaskDelay(100);
+    }
+
+    TEST_ESP_OK(temperature_sensor_disable(temp_handle));
+    TEST_ESP_OK(temperature_sensor_uninstall(temp_handle));
+    // delete etm primitives
+    TEST_ESP_OK(gpio_etm_task_rm_gpio(gpio_task, output_gpio));
+    TEST_ESP_OK(esp_etm_del_task(gpio_task));
+    TEST_ESP_OK(esp_etm_del_event(tsens_evt));
+    TEST_ESP_OK(esp_etm_channel_disable(etm_channel_a));
+    TEST_ESP_OK(esp_etm_del_channel(etm_channel_a));
+}
diff --git a/components/esp_hw_support/include/esp_private/etm_interface.h b/components/esp_hw_support/include/esp_private/etm_interface.h
index a7c7e42538..04c02964f9 100644
--- a/components/esp_hw_support/include/esp_private/etm_interface.h
+++ b/components/esp_hw_support/include/esp_private/etm_interface.h
@@ -26,6 +26,7 @@ typedef enum {
     ETM_TRIG_PERIPH_SYSTIMER, /*!< ETM trigger source: Systimer */
     ETM_TRIG_PERIPH_MCPWM,    /*!< ETM trigger source: MCPWM */
     ETM_TRIG_PERIPH_ANA_CMPR, /*!< ETM trigger source: Analog Comparator */
+    ETM_TRIG_PERIPH_TSENS,    /*!< ETM trigger source: Temperature Sensor */
 } etm_trigger_peripheral_t;
 
 /**
diff --git a/components/hal/esp32c6/include/hal/temperature_sensor_ll.h b/components/hal/esp32c6/include/hal/temperature_sensor_ll.h
index 17ac106e08..4c73df1a1f 100644
--- a/components/hal/esp32c6/include/hal/temperature_sensor_ll.h
+++ b/components/hal/esp32c6/include/hal/temperature_sensor_ll.h
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2022-2023 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2022-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -25,6 +25,7 @@
 #include "soc/soc_caps.h"
 #include "soc/pcr_struct.h"
 #include "soc/interrupts.h"
+#include "soc/soc_etm_source.h"
 #include "hal/temperature_sensor_types.h"
 #include "hal/assert.h"
 #include "hal/misc.h"
@@ -41,6 +42,17 @@ extern "C" {
 
 #define TEMPERATURE_SENSOR_LL_INTR_MASK      APB_SARADC_APB_SARADC_TSENS_INT_ST
 
+#define TEMPERATURE_SENSOR_LL_ETM_EVENT_TABLE(event)                     \
+    (uint32_t [TEMPERATURE_SENSOR_EVENT_MAX]){                           \
+        [TEMPERATURE_SENSOR_EVENT_OVER_LIMIT] = TMPSNSR_EVT_OVER_LIMIT,  \
+    }[event]
+
+#define TEMPERATURE_SENSOR_LL_ETM_TASK_TABLE(task)                     \
+    (uint32_t [TEMPERATURE_SENSOR_TASK_MAX]){                           \
+        [TEMPERATURE_SENSOR_TASK_START] = TMPSNSR_TASK_START_SAMPLE,    \
+        [TEMPERATURE_SENSOR_TASK_STOP] = TMPSNSR_TASK_STOP_SAMPLE,      \
+    }[task]
+
 typedef enum {
     TEMPERATURE_SENSOR_LL_WAKE_ABSOLUTE = 0,
     TEMPERATURE_SENSOR_LL_WAKE_DELTA = 1,
diff --git a/components/hal/esp32h2/include/hal/temperature_sensor_ll.h b/components/hal/esp32h2/include/hal/temperature_sensor_ll.h
index 6007f05c51..71e9d87507 100644
--- a/components/hal/esp32h2/include/hal/temperature_sensor_ll.h
+++ b/components/hal/esp32h2/include/hal/temperature_sensor_ll.h
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2022-2023 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2022-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -24,6 +24,7 @@
 #include "soc/soc_caps.h"
 #include "soc/pcr_struct.h"
 #include "soc/interrupts.h"
+#include "soc/soc_etm_source.h"
 #include "hal/temperature_sensor_types.h"
 #include "hal/assert.h"
 #include "hal/misc.h"
@@ -40,6 +41,17 @@ extern "C" {
 
 #define TEMPERATURE_SENSOR_LL_INTR_MASK      APB_SARADC_APB_SARADC_TSENS_INT_ST
 
+#define TEMPERATURE_SENSOR_LL_ETM_EVENT_TABLE(event)                     \
+    (uint32_t [TEMPERATURE_SENSOR_EVENT_MAX]){                           \
+        [TEMPERATURE_SENSOR_EVENT_OVER_LIMIT] = TMPSNSR_EVT_OVER_LIMIT,  \
+    }[event]
+
+#define TEMPERATURE_SENSOR_LL_ETM_TASK_TABLE(task)                     \
+    (uint32_t [TEMPERATURE_SENSOR_TASK_MAX]){                           \
+        [TEMPERATURE_SENSOR_TASK_START] = TMPSNSR_TASK_START_SAMPLE,    \
+        [TEMPERATURE_SENSOR_TASK_STOP] = TMPSNSR_TASK_STOP_SAMPLE,      \
+    }[task]
+
 typedef enum {
     TEMPERATURE_SENSOR_LL_WAKE_ABSOLUTE = 0,
     TEMPERATURE_SENSOR_LL_WAKE_DELTA = 1,
diff --git a/components/hal/esp32p4/include/hal/temperature_sensor_ll.h b/components/hal/esp32p4/include/hal/temperature_sensor_ll.h
index 637bcb697c..72c76d2273 100644
--- a/components/hal/esp32p4/include/hal/temperature_sensor_ll.h
+++ b/components/hal/esp32p4/include/hal/temperature_sensor_ll.h
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -24,6 +24,7 @@
 #include "soc/soc.h"
 #include "soc/soc_caps.h"
 #include "soc/interrupts.h"
+#include "soc/soc_etm_source.h"
 #include "hal/temperature_sensor_types.h"
 #include "hal/assert.h"
 #include "hal/misc.h"
@@ -40,6 +41,17 @@ extern "C" {
 
 #define TEMPERATURE_SENSOR_LL_INTR_MASK      TSENS_COCPU_TSENS_WAKE_INT_ST
 
+#define TEMPERATURE_SENSOR_LL_ETM_EVENT_TABLE(event)                     \
+    (uint32_t [TEMPERATURE_SENSOR_EVENT_MAX]){                           \
+        [TEMPERATURE_SENSOR_EVENT_OVER_LIMIT] = TMPSNSR_EVT_OVER_LIMIT,  \
+    }[event]
+
+#define TEMPERATURE_SENSOR_LL_ETM_TASK_TABLE(task)                     \
+    (uint32_t [TEMPERATURE_SENSOR_TASK_MAX]){                           \
+        [TEMPERATURE_SENSOR_TASK_START] = TMPSNSR_TASK_START_SAMPLE,    \
+        [TEMPERATURE_SENSOR_TASK_STOP] = TMPSNSR_TASK_STOP_SAMPLE,      \
+    }[task]
+
 typedef enum {
     TEMPERATURE_SENSOR_LL_WAKE_ABSOLUTE = 0,
     TEMPERATURE_SENSOR_LL_WAKE_DELTA = 1,
diff --git a/components/hal/include/hal/temperature_sensor_types.h b/components/hal/include/hal/temperature_sensor_types.h
index 0ffc0e4af8..886e36d6e4 100644
--- a/components/hal/include/hal/temperature_sensor_types.h
+++ b/components/hal/include/hal/temperature_sensor_types.h
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2021-2022 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2021-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */
@@ -22,6 +22,23 @@ typedef soc_periph_temperature_sensor_clk_src_t temperature_sensor_clk_src_t;
 typedef int temperature_sensor_clk_src_t;
 #endif // SOC_TEMP_SENSOR_SUPPORTED
 
+/**
+ * @brief temperature sensor event types enum
+ */
+typedef enum {
+    TEMPERATURE_SENSOR_EVENT_OVER_LIMIT,  /*!< Temperature sensor over limit event */
+    TEMPERATURE_SENSOR_EVENT_MAX,         /*!< Maximum number of temperature sensor events */
+} temperature_sensor_etm_event_type_t;
+
+/**
+ * @brief temperature sensor task types enum
+ */
+typedef enum {
+    TEMPERATURE_SENSOR_TASK_START,         /*!< Temperature sensor start task */
+    TEMPERATURE_SENSOR_TASK_STOP,          /*!< Temperature sensor stop task */
+    TEMPERATURE_SENSOR_TASK_MAX,           /*!< Maximum number of temperature sensor tasks */
+} temperature_sensor_etm_task_type_t;
+
 #ifdef __cplusplus
 }
 #endif
diff --git a/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
index d86c442bde..78d8f97b3c 100644
--- a/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32c6/include/soc/Kconfig.soc_caps.in
@@ -1335,6 +1335,10 @@ config SOC_TEMPERATURE_SENSOR_INTR_SUPPORT
     bool
     default y
 
+config SOC_TEMPERATURE_SENSOR_SUPPORT_ETM
+    bool
+    default y
+
 config SOC_WIFI_HW_TSF
     bool
     default y
diff --git a/components/soc/esp32c6/include/soc/soc_caps.h b/components/soc/esp32c6/include/soc/soc_caps.h
index 1c8ff2b70c..d1f1b49c30 100644
--- a/components/soc/esp32c6/include/soc/soc_caps.h
+++ b/components/soc/esp32c6/include/soc/soc_caps.h
@@ -536,6 +536,7 @@
 #define SOC_TEMPERATURE_SENSOR_SUPPORT_FAST_RC                (1)
 #define SOC_TEMPERATURE_SENSOR_SUPPORT_XTAL                   (1)
 #define SOC_TEMPERATURE_SENSOR_INTR_SUPPORT                   (1)
+#define SOC_TEMPERATURE_SENSOR_SUPPORT_ETM                    (1)
 
 /*------------------------------------ WI-FI CAPS ------------------------------------*/
 #define SOC_WIFI_HW_TSF                     (1)    /*!< Support hardware TSF */
diff --git a/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in b/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
index 385bd0abde..c8014abbff 100644
--- a/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32h2/include/soc/Kconfig.soc_caps.in
@@ -1299,6 +1299,10 @@ config SOC_TEMPERATURE_SENSOR_INTR_SUPPORT
     bool
     default y
 
+config SOC_TEMPERATURE_SENSOR_SUPPORT_ETM
+    bool
+    default y
+
 config SOC_BLE_SUPPORTED
     bool
     default y
diff --git a/components/soc/esp32h2/include/soc/soc_caps.h b/components/soc/esp32h2/include/soc/soc_caps.h
index d024c53146..122a2d4eb9 100644
--- a/components/soc/esp32h2/include/soc/soc_caps.h
+++ b/components/soc/esp32h2/include/soc/soc_caps.h
@@ -515,6 +515,7 @@
 #define SOC_TEMPERATURE_SENSOR_SUPPORT_FAST_RC                (1)
 #define SOC_TEMPERATURE_SENSOR_SUPPORT_XTAL                   (1)
 #define SOC_TEMPERATURE_SENSOR_INTR_SUPPORT                   (1)
+#define SOC_TEMPERATURE_SENSOR_SUPPORT_ETM                    (1)
 
 /*---------------------------------- Bluetooth CAPS ----------------------------------*/
 #define SOC_BLE_SUPPORTED               (1)    /*!< Support Bluetooth Low Energy hardware */
diff --git a/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in b/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
index 7c3445382c..5460a2551c 100644
--- a/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32p4/include/soc/Kconfig.soc_caps.in
@@ -1403,6 +1403,10 @@ config SOC_TSENS_IS_INDEPENDENT_FROM_ADC
     bool
     default y
 
+config SOC_TEMPERATURE_SENSOR_SUPPORT_ETM
+    bool
+    default y
+
 config SOC_MEM_TCM_SUPPORTED
     bool
     default y
diff --git a/components/soc/esp32p4/include/soc/soc_caps.h b/components/soc/esp32p4/include/soc/soc_caps.h
index 90c8a29fc1..59bf132dac 100644
--- a/components/soc/esp32p4/include/soc/soc_caps.h
+++ b/components/soc/esp32p4/include/soc/soc_caps.h
@@ -592,6 +592,7 @@
 #define SOC_TEMPERATURE_SENSOR_LP_PLL_SUPPORT                (1)
 #define SOC_TEMPERATURE_SENSOR_INTR_SUPPORT                  (1)
 #define SOC_TSENS_IS_INDEPENDENT_FROM_ADC                    (1)  /*!< Temperature sensor is a separate module, not share regs with ADC */
+#define SOC_TEMPERATURE_SENSOR_SUPPORT_ETM                   (1)
 
 /*-------------------------- Memory CAPS --------------------------*/
 #define SOC_MEM_TCM_SUPPORTED                      (1)
diff --git a/docs/doxygen/Doxyfile b/docs/doxygen/Doxyfile
index 7476855338..278eb61808 100644
--- a/docs/doxygen/Doxyfile
+++ b/docs/doxygen/Doxyfile
@@ -143,6 +143,7 @@ INPUT = \
     $(PROJECT_PATH)/components/esp_driver_spi/include/driver/spi_slave_hd.h \
     $(PROJECT_PATH)/components/esp_driver_spi/include/driver/spi_slave.h \
     $(PROJECT_PATH)/components/esp_driver_tsens/include/driver/temperature_sensor.h \
+    $(PROJECT_PATH)/components/esp_driver_tsens/include/driver/temperature_sensor_etm.h \
     $(PROJECT_PATH)/components/esp_driver_uart/include/driver/uart.h \
     $(PROJECT_PATH)/components/esp_driver_uart/include/driver/uart_vfs.h \
     $(PROJECT_PATH)/components/esp_eth/include/esp_eth_com.h \
@@ -251,6 +252,7 @@ INPUT = \
     $(PROJECT_PATH)/components/hal/include/hal/sdm_types.h \
     $(PROJECT_PATH)/components/hal/include/hal/spi_flash_types.h \
     $(PROJECT_PATH)/components/hal/include/hal/spi_types.h \
+    $(PROJECT_PATH)/components/hal/include/hal/temperature_sensor_types.h \
     $(PROJECT_PATH)/components/hal/include/hal/timer_types.h \
     $(PROJECT_PATH)/components/hal/include/hal/touch_sensor_types.h \
     $(PROJECT_PATH)/components/hal/include/hal/twai_types.h \
diff --git a/docs/en/api-reference/peripherals/etm.rst b/docs/en/api-reference/peripherals/etm.rst
index bca698df5d..8c9d901881 100644
--- a/docs/en/api-reference/peripherals/etm.rst
+++ b/docs/en/api-reference/peripherals/etm.rst
@@ -71,6 +71,7 @@ Other Peripheral Events
     :SOC_GDMA_SUPPORT_ETM: - Refer to :doc:`/api-reference/system/async_memcpy` for how to get the ETM event handle from async memcpy.
     :SOC_MCPWM_SUPPORT_ETM: - Refer to :doc:`/api-reference/peripherals/mcpwm` for how to get the ETM event handle from MCPWM.
     :SOC_ANA_CMPR_SUPPORT_ETM: - Refer to :doc:`/api-reference/peripherals/ana_cmpr` for how to get the ETM event handle from analog comparator.
+    :SOC_TEMPERATURE_SENSOR_SUPPORT_ETM: - Refer to :doc:`/api-reference/peripherals/temp_sensor` for how to get the ETM event handle from temperature sensor.
 
 .. _etm-task:
 
@@ -96,6 +97,7 @@ Other Peripheral Tasks
 .. list::
 
     :SOC_TIMER_SUPPORT_ETM: - Refer to :doc:`GPTimer </api-reference/peripherals/gptimer>` for how to get the ETM task handle from GPTimer.
+    :SOC_TEMPERATURE_SENSOR_SUPPORT_ETM: - Refer to :doc:`/api-reference/peripherals/temp_sensor` for how to get the ETM task handle from temperature sensor.
 
 .. _etm-channel-control:
 
diff --git a/docs/en/api-reference/peripherals/temp_sensor.rst b/docs/en/api-reference/peripherals/temp_sensor.rst
index 13ceb154e3..5a0be3676a 100644
--- a/docs/en/api-reference/peripherals/temp_sensor.rst
+++ b/docs/en/api-reference/peripherals/temp_sensor.rst
@@ -46,6 +46,7 @@ The description of the temperature sensor functionality is divided into the foll
     - :ref:`temp-power-management` - covers how the temperature sensor is affected when changing power mode (e.g., Light-sleep mode).
     :SOC_TEMPERATURE_SENSOR_INTR_SUPPORT: - :ref:`temp-iram-safe` - describes tips on how to make the temperature sensor interrupt work better along with a disabled cache.
     - :ref:`temp-thread-safety` - covers how to make the driver to be thread-safe.
+    :SOC_TEMPERATURE_SENSOR_SUPPORT_ETM: - :ref:`temperature-sensor-etm-event-and-task` - describes what the events and tasks can be connected to the ETM channel.
 
 .. _temp-resource-allocation:
 
@@ -180,6 +181,21 @@ Thread Safety
 
 In the temperature sensor driver, we do not add any protection to ensure the thread safety, because typically this driver is only supposed to be used in one task. If you have to use this driver in different tasks, please add extra locks to protect it.
 
+.. only:: SOC_TEMPERATURE_SENSOR_SUPPORT_ETM
+
+    .. _temperature-sensor-etm-event-and-task:
+
+    ETM Event and Task
+    ^^^^^^^^^^^^^^^^^^
+
+    Temperature Sensor is able to generate events that can interact with the :doc:`ETM </api-reference/peripherals/etm>` module. The supported events are listed in the :cpp:type:`temperature_sensor_etm_event_type_t`. You can call :cpp:func:`temperature_sensor_new_etm_event` to get the corresponding ETM event handle. The supported tasks are listed in the :cpp:type:`temperature_sensor_etm_task_type_t`. You can call :cpp:func:`temperature_sensor_new_etm_task` to get the corresponding ETM event handle.
+
+    .. note::
+
+        - :cpp:enumerator:`TEMPERATURE_SENSOR_EVENT_OVER_LIMIT` for :cpp:member:`temperature_sensor_etm_event_type_t::event_type` depends on what kind of threshold you set first. If you set the absolute threshold by :cpp:func:`temperature_sensor_set_absolute_threshold`, then the :cpp:enumerator:`TEMPERATURE_SENSOR_EVENT_OVER_LIMIT` refers to absolute threshold. Likewise, if you set the delta threshold by :cpp:func:`temperature_sensor_set_delta_threshold`, then the :cpp:enumerator:`TEMPERATURE_SENSOR_EVENT_OVER_LIMIT` refers to delta threshold.
+
+    For how to connect the event and task to an ETM channel, please refer to the :doc:`ETM </api-reference/peripherals/etm>` documentation.
+
 Unexpected Behaviors
 --------------------
 
@@ -202,3 +218,8 @@ API Reference
 ----------------------------------
 
 .. include-build-file:: inc/temperature_sensor.inc
+.. include-build-file:: inc/temperature_sensor_types.inc
+
+.. only:: SOC_TEMPERATURE_SENSOR_SUPPORT_ETM
+
+    .. include-build-file:: inc/temperature_sensor_etm.inc
diff --git a/examples/peripherals/temperature_sensor/temp_sensor_monitor/main/temp_sensor_monitor_main.c b/examples/peripherals/temperature_sensor/temp_sensor_monitor/main/temp_sensor_monitor_main.c
index 96e4e981c2..b75cd5960c 100644
--- a/examples/peripherals/temperature_sensor/temp_sensor_monitor/main/temp_sensor_monitor_main.c
+++ b/examples/peripherals/temperature_sensor/temp_sensor_monitor/main/temp_sensor_monitor_main.c
@@ -1,5 +1,5 @@
 /*
- * SPDX-FileCopyrightText: 2023 Espressif Systems (Shanghai) CO LTD
+ * SPDX-FileCopyrightText: 2023-2024 Espressif Systems (Shanghai) CO LTD
  *
  * SPDX-License-Identifier: Apache-2.0
  */