diff --git a/components/soc/CMakeLists.txt b/components/soc/CMakeLists.txt
index 7a4edbe222..9f9b4afd25 100644
--- a/components/soc/CMakeLists.txt
+++ b/components/soc/CMakeLists.txt
@@ -1,143 +1,151 @@
 idf_build_get_property(target IDF_TARGET)
 
+if(CONFIG_IDF_TARGET_ESP32C5_BETA3_VERSION)
+    set(target_folder "esp32c5/beta3")
+elseif(CONFIG_IDF_TARGET_ESP32C5_MP_VERSION)
+    set(target_folder "esp32c5/mp")
+else()
+    set(target_folder "${target}")
+endif()
+
 # On Linux the soc component is a simple wrapper, without much functionality
 if(NOT ${target} STREQUAL "linux")
     set(srcs "lldesc.c"
              "dport_access_common.c"
-             "${target}/interrupts.c"
-             "${target}/gpio_periph.c"
-             "${target}/uart_periph.c")
+             "${target_folder}/interrupts.c"
+             "${target_folder}/gpio_periph.c"
+             "${target_folder}/uart_periph.c")
 endif()
 
-set(includes "include" "${target}")
+set(includes "include" "${target_folder}")
 
-if(EXISTS "${CMAKE_CURRENT_SOURCE_DIR}/${target}/include")
-    list(APPEND includes "${target}/include")
+if(EXISTS "${CMAKE_CURRENT_SOURCE_DIR}/${target_folder}/include")
+    list(APPEND includes "${target_folder}/include")
 endif()
 
 if(target STREQUAL "esp32")
-    list(APPEND srcs "${target}/dport_access.c")
+    list(APPEND srcs "${target_folder}/dport_access.c")
 endif()
 
 if(CONFIG_SOC_ADC_SUPPORTED)
-    list(APPEND srcs "${target}/adc_periph.c")
+    list(APPEND srcs "${target_folder}/adc_periph.c")
 endif()
 
 if(CONFIG_SOC_ANA_CMPR_SUPPORTED)
-    list(APPEND srcs "${target}/ana_cmpr_periph.c")
+    list(APPEND srcs "${target_folder}/ana_cmpr_periph.c")
 endif()
 
 if(CONFIG_SOC_DEDICATED_GPIO_SUPPORTED)
-    list(APPEND srcs "${target}/dedic_gpio_periph.c")
+    list(APPEND srcs "${target_folder}/dedic_gpio_periph.c")
 endif()
 
 if(CONFIG_SOC_GDMA_SUPPORTED)
-    list(APPEND srcs "${target}/gdma_periph.c")
+    list(APPEND srcs "${target_folder}/gdma_periph.c")
 endif()
 
 if(CONFIG_SOC_DMA2D_SUPPORTED)
-    list(APPEND srcs "${target}/dma2d_periph.c")
+    list(APPEND srcs "${target_folder}/dma2d_periph.c")
 endif()
 
 if(CONFIG_SOC_GPSPI_SUPPORTED)
-    list(APPEND srcs "${target}/spi_periph.c")
+    list(APPEND srcs "${target_folder}/spi_periph.c")
 endif()
 
 if(CONFIG_SOC_LEDC_SUPPORTED)
-    list(APPEND srcs "${target}/ledc_periph.c")
+    list(APPEND srcs "${target_folder}/ledc_periph.c")
 endif()
 
 if(CONFIG_SOC_PCNT_SUPPORTED)
-    list(APPEND srcs "${target}/pcnt_periph.c")
+    list(APPEND srcs "${target_folder}/pcnt_periph.c")
 endif()
 
 if(CONFIG_SOC_RMT_SUPPORTED)
-    list(APPEND srcs "${target}/rmt_periph.c")
+    list(APPEND srcs "${target_folder}/rmt_periph.c")
 endif()
 
 if(CONFIG_SOC_SDM_SUPPORTED)
-    list(APPEND srcs "${target}/sdm_periph.c")
+    list(APPEND srcs "${target_folder}/sdm_periph.c")
 endif()
 
 if(CONFIG_SOC_I2S_SUPPORTED)
-    list(APPEND srcs "${target}/i2s_periph.c")
+    list(APPEND srcs "${target_folder}/i2s_periph.c")
 endif()
 
 if(CONFIG_SOC_I2C_SUPPORTED)
-    list(APPEND srcs "${target}/i2c_periph.c")
+    list(APPEND srcs "${target_folder}/i2c_periph.c")
 endif()
 
 if(CONFIG_SOC_TEMP_SENSOR_SUPPORTED)
-    list(APPEND srcs "${target}/temperature_sensor_periph.c")
+    list(APPEND srcs "${target_folder}/temperature_sensor_periph.c")
 endif()
 
 if(CONFIG_SOC_GPTIMER_SUPPORTED)
-    list(APPEND srcs "${target}/timer_periph.c")
+    list(APPEND srcs "${target_folder}/timer_periph.c")
 endif()
 
 if(CONFIG_SOC_LCDCAM_SUPPORTED OR CONFIG_SOC_LCD_I80_SUPPORTED)
-    list(APPEND srcs "${target}/lcd_periph.c")
+    list(APPEND srcs "${target_folder}/lcd_periph.c")
 endif()
 
 if(CONFIG_SOC_MIPI_DSI_SUPPORTED)
-    list(APPEND srcs "${target}/mipi_dsi_periph.c")
+    list(APPEND srcs "${target_folder}/mipi_dsi_periph.c")
 endif()
 
 if(CONFIG_SOC_MIPI_CSI_SUPPORTED)
-    list(APPEND srcs "${target}/mipi_csi_periph.c")
+    list(APPEND srcs "${target_folder}/mipi_csi_periph.c")
 endif()
 
 if(CONFIG_SOC_PARLIO_SUPPORTED)
-    list(APPEND srcs "${target}/parlio_periph.c")
+    list(APPEND srcs "${target_folder}/parlio_periph.c")
 endif()
 
 if(CONFIG_SOC_MCPWM_SUPPORTED)
-    list(APPEND srcs "${target}/mcpwm_periph.c")
+    list(APPEND srcs "${target_folder}/mcpwm_periph.c")
 endif()
 
 if(CONFIG_SOC_MPI_SUPPORTED)
-    list(APPEND srcs "${target}/mpi_periph.c")
+    list(APPEND srcs "${target_folder}/mpi_periph.c")
 endif()
 
 if(CONFIG_SOC_SDMMC_HOST_SUPPORTED)
-    list(APPEND srcs "${target}/sdmmc_periph.c")
+    list(APPEND srcs "${target_folder}/sdmmc_periph.c")
 endif()
 
 if(CONFIG_SOC_TOUCH_SENSOR_SUPPORTED)
-    list(APPEND srcs "${target}/touch_sensor_periph.c")
+    list(APPEND srcs "${target_folder}/touch_sensor_periph.c")
 endif()
 
 if(CONFIG_SOC_TWAI_SUPPORTED)
-    list(APPEND srcs "${target}/twai_periph.c")
+    list(APPEND srcs "${target_folder}/twai_periph.c")
 endif()
 
 if(CONFIG_SOC_IEEE802154_SUPPORTED)
     if(NOT target STREQUAL "esp32h4")
-        list(APPEND srcs "${target}/ieee802154_periph.c")
+        list(APPEND srcs "${target_folder}/ieee802154_periph.c")
     endif()
 endif()
 
 if(CONFIG_SOC_USB_OTG_SUPPORTED)
     if(NOT ${target} STREQUAL "esp32p4")
-        list(APPEND srcs "${target}/usb_periph.c"
-                         "${target}/usb_dwc_periph.c")
+        list(APPEND srcs "${target_folder}/usb_periph.c"
+                         "${target_folder}/usb_dwc_periph.c")
     endif()
 endif()
 
 if(CONFIG_SOC_DAC_SUPPORTED)
-    list(APPEND srcs "${target}/dac_periph.c")
+    list(APPEND srcs "${target_folder}/dac_periph.c")
 endif()
 
 if(CONFIG_SOC_RTCIO_PIN_COUNT GREATER 0)
-    list(APPEND srcs "${target}/rtc_io_periph.c")
+    list(APPEND srcs "${target_folder}/rtc_io_periph.c")
 endif()
 
 if(CONFIG_SOC_SDIO_SLAVE_SUPPORTED)
-    list(APPEND srcs "${target}/sdio_slave_periph.c")
+    list(APPEND srcs "${target_folder}/sdio_slave_periph.c")
 endif()
 
 if(CONFIG_SOC_PAU_SUPPORTED)
-    list(APPEND srcs "${target}/system_retention_periph.c")
+    list(APPEND srcs "${target_folder}/system_retention_periph.c")
 endif()
 
 idf_component_register(SRCS ${srcs}
@@ -158,5 +166,5 @@ if(target STREQUAL "esp32")
 endif()
 
 if(NOT CONFIG_IDF_TARGET_LINUX)
-     target_linker_script(${COMPONENT_LIB} INTERFACE "${target}/ld/${target}.peripherals.ld")
+     target_linker_script(${COMPONENT_LIB} INTERFACE "${target_folder}/ld/${target}.peripherals.ld")
 endif()
diff --git a/components/soc/esp32c5/beta3/gpio_periph.c b/components/soc/esp32c5/beta3/gpio_periph.c
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/components/soc/esp32c5/include/modem/modem_lpcon_reg.h b/components/soc/esp32c5/beta3/include/modem/modem_lpcon_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/modem/modem_lpcon_reg.h
rename to components/soc/esp32c5/beta3/include/modem/modem_lpcon_reg.h
diff --git a/components/soc/esp32c5/include/modem/modem_lpcon_struct.h b/components/soc/esp32c5/beta3/include/modem/modem_lpcon_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/modem/modem_lpcon_struct.h
rename to components/soc/esp32c5/beta3/include/modem/modem_lpcon_struct.h
diff --git a/components/soc/esp32c5/include/modem/modem_syscon_reg.h b/components/soc/esp32c5/beta3/include/modem/modem_syscon_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/modem/modem_syscon_reg.h
rename to components/soc/esp32c5/beta3/include/modem/modem_syscon_reg.h
diff --git a/components/soc/esp32c5/include/modem/modem_syscon_struct.h b/components/soc/esp32c5/beta3/include/modem/modem_syscon_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/modem/modem_syscon_struct.h
rename to components/soc/esp32c5/beta3/include/modem/modem_syscon_struct.h
diff --git a/components/soc/esp32c5/include/modem/reg_base.h b/components/soc/esp32c5/beta3/include/modem/reg_base.h
similarity index 100%
rename from components/soc/esp32c5/include/modem/reg_base.h
rename to components/soc/esp32c5/beta3/include/modem/reg_base.h
diff --git a/components/soc/esp32c5/beta3/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c5/beta3/include/soc/Kconfig.soc_caps.in
new file mode 100644
index 0000000000..7d59c51278
--- /dev/null
+++ b/components/soc/esp32c5/beta3/include/soc/Kconfig.soc_caps.in
@@ -0,0 +1,332 @@
+#####################################################
+# This file is auto-generated from SoC caps
+# using gen_soc_caps_kconfig.py, do not edit manually
+#####################################################
+
+config SOC_UART_SUPPORTED
+    bool
+    default y
+
+config SOC_GPTIMER_SUPPORTED
+    bool
+    default y
+
+config SOC_EFUSE_KEY_PURPOSE_FIELD
+    bool
+    default y
+
+config SOC_EFUSE_SUPPORTED
+    bool
+    default y
+
+config SOC_RTC_FAST_MEM_SUPPORTED
+    bool
+    default y
+
+config SOC_RTC_MEM_SUPPORTED
+    bool
+    default y
+
+config SOC_SYSTIMER_SUPPORTED
+    bool
+    default y
+
+config SOC_FLASH_ENC_SUPPORTED
+    bool
+    default y
+
+config SOC_SPI_FLASH_SUPPORTED
+    bool
+    default y
+
+config SOC_XTAL_SUPPORT_40M
+    bool
+    default y
+
+config SOC_XTAL_SUPPORT_48M
+    bool
+    default y
+
+config SOC_ADC_PERIPH_NUM
+    int
+    default 1
+
+config SOC_ADC_MAX_CHANNEL_NUM
+    int
+    default 7
+
+config SOC_SHARED_IDCACHE_SUPPORTED
+    bool
+    default y
+
+config SOC_CACHE_FREEZE_SUPPORTED
+    bool
+    default y
+
+config SOC_CPU_CORES_NUM
+    int
+    default 1
+
+config SOC_CPU_INTR_NUM
+    int
+    default 32
+
+config SOC_CPU_HAS_FLEXIBLE_INTC
+    bool
+    default y
+
+config SOC_INT_CLIC_SUPPORTED
+    bool
+    default y
+
+config SOC_INT_HW_NESTED_SUPPORTED
+    bool
+    default y
+
+config SOC_BRANCH_PREDICTOR_SUPPORTED
+    bool
+    default y
+
+config SOC_CPU_BREAKPOINTS_NUM
+    int
+    default 4
+
+config SOC_CPU_WATCHPOINTS_NUM
+    int
+    default 4
+
+config SOC_CPU_WATCHPOINT_MAX_REGION_SIZE
+    hex
+    default 0x100
+
+config SOC_CPU_HAS_PMA
+    bool
+    default y
+
+config SOC_CPU_IDRAM_SPLIT_USING_PMP
+    bool
+    default y
+
+config SOC_GPIO_PIN_COUNT
+    int
+    default 31
+
+config SOC_GPIO_IN_RANGE_MAX
+    int
+    default 30
+
+config SOC_GPIO_OUT_RANGE_MAX
+    int
+    default 30
+
+config SOC_GPIO_SUPPORT_HOLD_SINGLE_IO_IN_DSLP
+    bool
+    default y
+
+config SOC_RTCIO_PIN_COUNT
+    bool
+    default n
+
+config SOC_I2C_NUM
+    int
+    default 2
+
+config SOC_LEDC_SUPPORT_PLL_DIV_CLOCK
+    bool
+    default y
+
+config SOC_LEDC_SUPPORT_XTAL_CLOCK
+    bool
+    default y
+
+config SOC_LEDC_CHANNEL_NUM
+    int
+    default 6
+
+config SOC_MMU_PERIPH_NUM
+    int
+    default 1
+
+config SOC_MMU_LINEAR_ADDRESS_REGION_NUM
+    int
+    default 1
+
+config SOC_MMU_DI_VADDR_SHARED
+    bool
+    default y
+
+config SOC_RSA_MAX_BIT_LEN
+    int
+    default 3072
+
+config SOC_SPI_PERIPH_NUM
+    int
+    default 2
+
+config SOC_SPI_MAX_CS_NUM
+    int
+    default 6
+
+config SOC_MEMSPI_SRC_FREQ_80M_SUPPORTED
+    bool
+    default y
+
+config SOC_MEMSPI_SRC_FREQ_40M_SUPPORTED
+    bool
+    default y
+
+config SOC_MEMSPI_SRC_FREQ_20M_SUPPORTED
+    bool
+    default y
+
+config SOC_SYSTIMER_COUNTER_NUM
+    int
+    default 2
+
+config SOC_SYSTIMER_ALARM_NUM
+    int
+    default 3
+
+config SOC_SYSTIMER_BIT_WIDTH_LO
+    int
+    default 32
+
+config SOC_SYSTIMER_BIT_WIDTH_HI
+    int
+    default 20
+
+config SOC_SYSTIMER_FIXED_DIVIDER
+    bool
+    default y
+
+config SOC_SYSTIMER_SUPPORT_RC_FAST
+    bool
+    default y
+
+config SOC_SYSTIMER_INT_LEVEL
+    bool
+    default y
+
+config SOC_SYSTIMER_ALARM_MISS_COMPENSATE
+    bool
+    default y
+
+config SOC_TIMER_GROUPS
+    int
+    default 2
+
+config SOC_TIMER_GROUP_TIMERS_PER_GROUP
+    int
+    default 1
+
+config SOC_TIMER_GROUP_COUNTER_BIT_WIDTH
+    int
+    default 54
+
+config SOC_TIMER_GROUP_SUPPORT_XTAL
+    bool
+    default y
+
+config SOC_TIMER_GROUP_TOTAL_TIMERS
+    int
+    default 2
+
+config SOC_EFUSE_SECURE_BOOT_KEY_DIGESTS
+    int
+    default 3
+
+config SOC_FLASH_ENCRYPTED_XTS_AES_BLOCK_MAX
+    int
+    default 64
+
+config SOC_FLASH_ENCRYPTION_XTS_AES
+    bool
+    default y
+
+config SOC_FLASH_ENCRYPTION_XTS_AES_128
+    bool
+    default y
+
+config SOC_UART_NUM
+    int
+    default 3
+
+config SOC_UART_HP_NUM
+    int
+    default 2
+
+config SOC_UART_LP_NUM
+    int
+    default 1
+
+config SOC_UART_FIFO_LEN
+    int
+    default 128
+
+config SOC_LP_UART_FIFO_LEN
+    int
+    default 16
+
+config SOC_UART_SUPPORT_XTAL_CLK
+    bool
+    default y
+
+config SOC_PM_SUPPORT_CPU_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_MODEM_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_XTAL32K_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_RC32K_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_RC_FAST_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_VDDSDIO_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_TOP_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_HP_AON_PD
+    bool
+    default y
+
+config SOC_PM_SUPPORT_RTC_PERIPH_PD
+    bool
+    default y
+
+config SOC_CLK_RC_FAST_SUPPORT_CALIBRATION
+    bool
+    default y
+
+config SOC_MODEM_CLOCK_IS_INDEPENDENT
+    bool
+    default y
+
+config SOC_CLK_XTAL32K_SUPPORTED
+    bool
+    default y
+
+config SOC_CLK_OSC_SLOW_SUPPORTED
+    bool
+    default y
+
+config SOC_CLK_RC32K_SUPPORTED
+    bool
+    default y
+
+config SOC_RCC_IS_INDEPENDENT
+    bool
+    default y
diff --git a/components/soc/esp32c5/include/soc/adc_channel.h b/components/soc/esp32c5/beta3/include/soc/adc_channel.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/adc_channel.h
rename to components/soc/esp32c5/beta3/include/soc/adc_channel.h
diff --git a/components/soc/esp32c5/include/soc/aes_reg.h b/components/soc/esp32c5/beta3/include/soc/aes_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/aes_reg.h
rename to components/soc/esp32c5/beta3/include/soc/aes_reg.h
diff --git a/components/soc/esp32c5/include/soc/aes_struct.h b/components/soc/esp32c5/beta3/include/soc/aes_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/aes_struct.h
rename to components/soc/esp32c5/beta3/include/soc/aes_struct.h
diff --git a/components/soc/esp32c5/include/soc/apb_saradc_reg.h b/components/soc/esp32c5/beta3/include/soc/apb_saradc_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/apb_saradc_reg.h
rename to components/soc/esp32c5/beta3/include/soc/apb_saradc_reg.h
diff --git a/components/soc/esp32c5/include/soc/apb_saradc_struct.h b/components/soc/esp32c5/beta3/include/soc/apb_saradc_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/apb_saradc_struct.h
rename to components/soc/esp32c5/beta3/include/soc/apb_saradc_struct.h
diff --git a/components/soc/esp32c5/include/soc/assist_debug_reg.h b/components/soc/esp32c5/beta3/include/soc/assist_debug_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/assist_debug_reg.h
rename to components/soc/esp32c5/beta3/include/soc/assist_debug_reg.h
diff --git a/components/soc/esp32c5/include/soc/assist_debug_struct.h b/components/soc/esp32c5/beta3/include/soc/assist_debug_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/assist_debug_struct.h
rename to components/soc/esp32c5/beta3/include/soc/assist_debug_struct.h
diff --git a/components/soc/esp32c5/include/soc/bitscrambler_reg.h b/components/soc/esp32c5/beta3/include/soc/bitscrambler_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/bitscrambler_reg.h
rename to components/soc/esp32c5/beta3/include/soc/bitscrambler_reg.h
diff --git a/components/soc/esp32c5/include/soc/bitscrambler_struct.h b/components/soc/esp32c5/beta3/include/soc/bitscrambler_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/bitscrambler_struct.h
rename to components/soc/esp32c5/beta3/include/soc/bitscrambler_struct.h
diff --git a/components/soc/esp32c5/include/soc/cache_reg.h b/components/soc/esp32c5/beta3/include/soc/cache_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/cache_reg.h
rename to components/soc/esp32c5/beta3/include/soc/cache_reg.h
diff --git a/components/soc/esp32c5/include/soc/cache_struct.h b/components/soc/esp32c5/beta3/include/soc/cache_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/cache_struct.h
rename to components/soc/esp32c5/beta3/include/soc/cache_struct.h
diff --git a/components/soc/esp32c5/include/soc/clic_reg.h b/components/soc/esp32c5/beta3/include/soc/clic_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/clic_reg.h
rename to components/soc/esp32c5/beta3/include/soc/clic_reg.h
diff --git a/components/soc/esp32c5/include/soc/clk_tree_defs.h b/components/soc/esp32c5/beta3/include/soc/clk_tree_defs.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/clk_tree_defs.h
rename to components/soc/esp32c5/beta3/include/soc/clk_tree_defs.h
diff --git a/components/soc/esp32c5/include/soc/dport_access.h b/components/soc/esp32c5/beta3/include/soc/dport_access.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/dport_access.h
rename to components/soc/esp32c5/beta3/include/soc/dport_access.h
diff --git a/components/soc/esp32c5/include/soc/ds_reg.h b/components/soc/esp32c5/beta3/include/soc/ds_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ds_reg.h
rename to components/soc/esp32c5/beta3/include/soc/ds_reg.h
diff --git a/components/soc/esp32c5/include/soc/ds_struct.h b/components/soc/esp32c5/beta3/include/soc/ds_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ds_struct.h
rename to components/soc/esp32c5/beta3/include/soc/ds_struct.h
diff --git a/components/soc/esp32c5/include/soc/ecc_mult_reg.h b/components/soc/esp32c5/beta3/include/soc/ecc_mult_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ecc_mult_reg.h
rename to components/soc/esp32c5/beta3/include/soc/ecc_mult_reg.h
diff --git a/components/soc/esp32c5/include/soc/ecc_mult_struct.h b/components/soc/esp32c5/beta3/include/soc/ecc_mult_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ecc_mult_struct.h
rename to components/soc/esp32c5/beta3/include/soc/ecc_mult_struct.h
diff --git a/components/soc/esp32c5/include/soc/ecdsa_reg.h b/components/soc/esp32c5/beta3/include/soc/ecdsa_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ecdsa_reg.h
rename to components/soc/esp32c5/beta3/include/soc/ecdsa_reg.h
diff --git a/components/soc/esp32c5/include/soc/ecdsa_struct.h b/components/soc/esp32c5/beta3/include/soc/ecdsa_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/ecdsa_struct.h
rename to components/soc/esp32c5/beta3/include/soc/ecdsa_struct.h
diff --git a/components/soc/esp32c5/include/soc/efuse_reg.h b/components/soc/esp32c5/beta3/include/soc/efuse_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/efuse_reg.h
rename to components/soc/esp32c5/beta3/include/soc/efuse_reg.h
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similarity index 100%
rename from components/soc/esp32c5/include/soc/otp_debug_struct.h
rename to components/soc/esp32c5/beta3/include/soc/otp_debug_struct.h
diff --git a/components/soc/esp32c5/include/soc/parl_io_reg.h b/components/soc/esp32c5/beta3/include/soc/parl_io_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/parl_io_reg.h
rename to components/soc/esp32c5/beta3/include/soc/parl_io_reg.h
diff --git a/components/soc/esp32c5/include/soc/parl_io_struct.h b/components/soc/esp32c5/beta3/include/soc/parl_io_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/parl_io_struct.h
rename to components/soc/esp32c5/beta3/include/soc/parl_io_struct.h
diff --git a/components/soc/esp32c5/include/soc/pau_reg.h b/components/soc/esp32c5/beta3/include/soc/pau_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pau_reg.h
rename to components/soc/esp32c5/beta3/include/soc/pau_reg.h
diff --git a/components/soc/esp32c5/include/soc/pau_struct.h b/components/soc/esp32c5/beta3/include/soc/pau_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pau_struct.h
rename to components/soc/esp32c5/beta3/include/soc/pau_struct.h
diff --git a/components/soc/esp32c5/include/soc/pcnt_reg.h b/components/soc/esp32c5/beta3/include/soc/pcnt_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pcnt_reg.h
rename to components/soc/esp32c5/beta3/include/soc/pcnt_reg.h
diff --git a/components/soc/esp32c5/include/soc/pcnt_struct.h b/components/soc/esp32c5/beta3/include/soc/pcnt_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pcnt_struct.h
rename to components/soc/esp32c5/beta3/include/soc/pcnt_struct.h
diff --git a/components/soc/esp32c5/include/soc/pcr_reg.h b/components/soc/esp32c5/beta3/include/soc/pcr_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pcr_reg.h
rename to components/soc/esp32c5/beta3/include/soc/pcr_reg.h
diff --git a/components/soc/esp32c5/include/soc/pcr_struct.h b/components/soc/esp32c5/beta3/include/soc/pcr_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pcr_struct.h
rename to components/soc/esp32c5/beta3/include/soc/pcr_struct.h
diff --git a/components/soc/esp32c5/include/soc/periph_defs.h b/components/soc/esp32c5/beta3/include/soc/periph_defs.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/periph_defs.h
rename to components/soc/esp32c5/beta3/include/soc/periph_defs.h
diff --git a/components/soc/esp32c5/include/soc/pmu_icg_mapping.h b/components/soc/esp32c5/beta3/include/soc/pmu_icg_mapping.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pmu_icg_mapping.h
rename to components/soc/esp32c5/beta3/include/soc/pmu_icg_mapping.h
diff --git a/components/soc/esp32c5/include/soc/pmu_reg.h b/components/soc/esp32c5/beta3/include/soc/pmu_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pmu_reg.h
rename to components/soc/esp32c5/beta3/include/soc/pmu_reg.h
diff --git a/components/soc/esp32c5/include/soc/pmu_struct.h b/components/soc/esp32c5/beta3/include/soc/pmu_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/pmu_struct.h
rename to components/soc/esp32c5/beta3/include/soc/pmu_struct.h
diff --git a/components/soc/esp32c5/include/soc/reg_base.h b/components/soc/esp32c5/beta3/include/soc/reg_base.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/reg_base.h
rename to components/soc/esp32c5/beta3/include/soc/reg_base.h
diff --git a/components/soc/esp32c5/include/soc/regi2c_bbpll.h b/components/soc/esp32c5/beta3/include/soc/regi2c_bbpll.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/regi2c_bbpll.h
rename to components/soc/esp32c5/beta3/include/soc/regi2c_bbpll.h
diff --git a/components/soc/esp32c5/include/soc/regi2c_defs.h b/components/soc/esp32c5/beta3/include/soc/regi2c_defs.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/regi2c_defs.h
rename to components/soc/esp32c5/beta3/include/soc/regi2c_defs.h
diff --git a/components/soc/esp32c5/include/soc/regi2c_dig_reg.h b/components/soc/esp32c5/beta3/include/soc/regi2c_dig_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/regi2c_dig_reg.h
rename to components/soc/esp32c5/beta3/include/soc/regi2c_dig_reg.h
diff --git a/components/soc/esp32c5/include/soc/reset_reasons.h b/components/soc/esp32c5/beta3/include/soc/reset_reasons.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/reset_reasons.h
rename to components/soc/esp32c5/beta3/include/soc/reset_reasons.h
diff --git a/components/soc/esp32c5/include/soc/retention_periph_defs.h b/components/soc/esp32c5/beta3/include/soc/retention_periph_defs.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/retention_periph_defs.h
rename to components/soc/esp32c5/beta3/include/soc/retention_periph_defs.h
diff --git a/components/soc/esp32c5/include/soc/rmt_reg.h b/components/soc/esp32c5/beta3/include/soc/rmt_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/rmt_reg.h
rename to components/soc/esp32c5/beta3/include/soc/rmt_reg.h
diff --git a/components/soc/esp32c5/include/soc/rmt_struct.h b/components/soc/esp32c5/beta3/include/soc/rmt_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/rmt_struct.h
rename to components/soc/esp32c5/beta3/include/soc/rmt_struct.h
diff --git a/components/soc/esp32c5/include/soc/rsa_reg.h b/components/soc/esp32c5/beta3/include/soc/rsa_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/rsa_reg.h
rename to components/soc/esp32c5/beta3/include/soc/rsa_reg.h
diff --git a/components/soc/esp32c5/include/soc/rsa_struct.h b/components/soc/esp32c5/beta3/include/soc/rsa_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/rsa_struct.h
rename to components/soc/esp32c5/beta3/include/soc/rsa_struct.h
diff --git a/components/soc/esp32c5/include/soc/rtc_io_channel.h b/components/soc/esp32c5/beta3/include/soc/rtc_io_channel.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/rtc_io_channel.h
rename to components/soc/esp32c5/beta3/include/soc/rtc_io_channel.h
diff --git a/components/soc/esp32c5/include/soc/sha_reg.h b/components/soc/esp32c5/beta3/include/soc/sha_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/sha_reg.h
rename to components/soc/esp32c5/beta3/include/soc/sha_reg.h
diff --git a/components/soc/esp32c5/include/soc/sha_struct.h b/components/soc/esp32c5/beta3/include/soc/sha_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/sha_struct.h
rename to components/soc/esp32c5/beta3/include/soc/sha_struct.h
diff --git a/components/soc/esp32c5/include/soc/soc.h b/components/soc/esp32c5/beta3/include/soc/soc.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/soc.h
rename to components/soc/esp32c5/beta3/include/soc/soc.h
diff --git a/components/soc/esp32c5/include/soc/soc_caps.h b/components/soc/esp32c5/beta3/include/soc/soc_caps.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/soc_caps.h
rename to components/soc/esp32c5/beta3/include/soc/soc_caps.h
diff --git a/components/soc/esp32c5/include/soc/soc_etm_reg.h b/components/soc/esp32c5/beta3/include/soc/soc_etm_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/soc_etm_reg.h
rename to components/soc/esp32c5/beta3/include/soc/soc_etm_reg.h
diff --git a/components/soc/esp32c5/include/soc/soc_etm_struct.h b/components/soc/esp32c5/beta3/include/soc/soc_etm_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/soc_etm_struct.h
rename to components/soc/esp32c5/beta3/include/soc/soc_etm_struct.h
diff --git a/components/soc/esp32c5/include/soc/soc_pins.h b/components/soc/esp32c5/beta3/include/soc/soc_pins.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/soc_pins.h
rename to components/soc/esp32c5/beta3/include/soc/soc_pins.h
diff --git a/components/soc/esp32c5/include/soc/spi1_mem_reg.h b/components/soc/esp32c5/beta3/include/soc/spi1_mem_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi1_mem_reg.h
rename to components/soc/esp32c5/beta3/include/soc/spi1_mem_reg.h
diff --git a/components/soc/esp32c5/include/soc/spi1_mem_struct.h b/components/soc/esp32c5/beta3/include/soc/spi1_mem_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi1_mem_struct.h
rename to components/soc/esp32c5/beta3/include/soc/spi1_mem_struct.h
diff --git a/components/soc/esp32c5/include/soc/spi_mem_reg.h b/components/soc/esp32c5/beta3/include/soc/spi_mem_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi_mem_reg.h
rename to components/soc/esp32c5/beta3/include/soc/spi_mem_reg.h
diff --git a/components/soc/esp32c5/include/soc/spi_mem_struct.h b/components/soc/esp32c5/beta3/include/soc/spi_mem_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi_mem_struct.h
rename to components/soc/esp32c5/beta3/include/soc/spi_mem_struct.h
diff --git a/components/soc/esp32c5/include/soc/spi_pins.h b/components/soc/esp32c5/beta3/include/soc/spi_pins.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi_pins.h
rename to components/soc/esp32c5/beta3/include/soc/spi_pins.h
diff --git a/components/soc/esp32c5/include/soc/spi_reg.h b/components/soc/esp32c5/beta3/include/soc/spi_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi_reg.h
rename to components/soc/esp32c5/beta3/include/soc/spi_reg.h
diff --git a/components/soc/esp32c5/include/soc/spi_struct.h b/components/soc/esp32c5/beta3/include/soc/spi_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/spi_struct.h
rename to components/soc/esp32c5/beta3/include/soc/spi_struct.h
diff --git a/components/soc/esp32c5/include/soc/system_periph_retention.h b/components/soc/esp32c5/beta3/include/soc/system_periph_retention.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/system_periph_retention.h
rename to components/soc/esp32c5/beta3/include/soc/system_periph_retention.h
diff --git a/components/soc/esp32c5/include/soc/system_reg.h b/components/soc/esp32c5/beta3/include/soc/system_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/system_reg.h
rename to components/soc/esp32c5/beta3/include/soc/system_reg.h
diff --git a/components/soc/esp32c5/include/soc/systimer_reg.h b/components/soc/esp32c5/beta3/include/soc/systimer_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/systimer_reg.h
rename to components/soc/esp32c5/beta3/include/soc/systimer_reg.h
diff --git a/components/soc/esp32c5/include/soc/systimer_struct.h b/components/soc/esp32c5/beta3/include/soc/systimer_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/systimer_struct.h
rename to components/soc/esp32c5/beta3/include/soc/systimer_struct.h
diff --git a/components/soc/esp32c5/include/soc/tee_reg.h b/components/soc/esp32c5/beta3/include/soc/tee_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/tee_reg.h
rename to components/soc/esp32c5/beta3/include/soc/tee_reg.h
diff --git a/components/soc/esp32c5/include/soc/tee_struct.h b/components/soc/esp32c5/beta3/include/soc/tee_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/tee_struct.h
rename to components/soc/esp32c5/beta3/include/soc/tee_struct.h
diff --git a/components/soc/esp32c5/include/soc/timer_group_reg.h b/components/soc/esp32c5/beta3/include/soc/timer_group_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/timer_group_reg.h
rename to components/soc/esp32c5/beta3/include/soc/timer_group_reg.h
diff --git a/components/soc/esp32c5/include/soc/timer_group_struct.h b/components/soc/esp32c5/beta3/include/soc/timer_group_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/timer_group_struct.h
rename to components/soc/esp32c5/beta3/include/soc/timer_group_struct.h
diff --git a/components/soc/esp32c5/include/soc/trace_reg.h b/components/soc/esp32c5/beta3/include/soc/trace_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/trace_reg.h
rename to components/soc/esp32c5/beta3/include/soc/trace_reg.h
diff --git a/components/soc/esp32c5/include/soc/trace_struct.h b/components/soc/esp32c5/beta3/include/soc/trace_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/trace_struct.h
rename to components/soc/esp32c5/beta3/include/soc/trace_struct.h
diff --git a/components/soc/esp32c5/include/soc/twai_reg.h b/components/soc/esp32c5/beta3/include/soc/twai_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/twai_reg.h
rename to components/soc/esp32c5/beta3/include/soc/twai_reg.h
diff --git a/components/soc/esp32c5/include/soc/twai_struct.h b/components/soc/esp32c5/beta3/include/soc/twai_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/twai_struct.h
rename to components/soc/esp32c5/beta3/include/soc/twai_struct.h
diff --git a/components/soc/esp32c5/include/soc/uart_channel.h b/components/soc/esp32c5/beta3/include/soc/uart_channel.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uart_channel.h
rename to components/soc/esp32c5/beta3/include/soc/uart_channel.h
diff --git a/components/soc/esp32c5/include/soc/uart_pins.h b/components/soc/esp32c5/beta3/include/soc/uart_pins.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uart_pins.h
rename to components/soc/esp32c5/beta3/include/soc/uart_pins.h
diff --git a/components/soc/esp32c5/include/soc/uart_reg.h b/components/soc/esp32c5/beta3/include/soc/uart_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uart_reg.h
rename to components/soc/esp32c5/beta3/include/soc/uart_reg.h
diff --git a/components/soc/esp32c5/include/soc/uart_struct.h b/components/soc/esp32c5/beta3/include/soc/uart_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uart_struct.h
rename to components/soc/esp32c5/beta3/include/soc/uart_struct.h
diff --git a/components/soc/esp32c5/include/soc/uhci_reg.h b/components/soc/esp32c5/beta3/include/soc/uhci_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uhci_reg.h
rename to components/soc/esp32c5/beta3/include/soc/uhci_reg.h
diff --git a/components/soc/esp32c5/include/soc/uhci_struct.h b/components/soc/esp32c5/beta3/include/soc/uhci_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/uhci_struct.h
rename to components/soc/esp32c5/beta3/include/soc/uhci_struct.h
diff --git a/components/soc/esp32c5/include/soc/usb_serial_jtag_reg.h b/components/soc/esp32c5/beta3/include/soc/usb_serial_jtag_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/usb_serial_jtag_reg.h
rename to components/soc/esp32c5/beta3/include/soc/usb_serial_jtag_reg.h
diff --git a/components/soc/esp32c5/include/soc/usb_serial_jtag_struct.h b/components/soc/esp32c5/beta3/include/soc/usb_serial_jtag_struct.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/usb_serial_jtag_struct.h
rename to components/soc/esp32c5/beta3/include/soc/usb_serial_jtag_struct.h
diff --git a/components/soc/esp32c5/include/soc/wdev_reg.h b/components/soc/esp32c5/beta3/include/soc/wdev_reg.h
similarity index 100%
rename from components/soc/esp32c5/include/soc/wdev_reg.h
rename to components/soc/esp32c5/beta3/include/soc/wdev_reg.h
diff --git a/components/soc/esp32c5/interrupts.c b/components/soc/esp32c5/beta3/interrupts.c
similarity index 100%
rename from components/soc/esp32c5/interrupts.c
rename to components/soc/esp32c5/beta3/interrupts.c
diff --git a/components/soc/esp32c5/ld/esp32c5.peripherals.ld b/components/soc/esp32c5/beta3/ld/esp32c5.peripherals.ld
similarity index 100%
rename from components/soc/esp32c5/ld/esp32c5.peripherals.ld
rename to components/soc/esp32c5/beta3/ld/esp32c5.peripherals.ld
diff --git a/components/soc/esp32c5/system_retention_periph.c b/components/soc/esp32c5/beta3/system_retention_periph.c
similarity index 100%
rename from components/soc/esp32c5/system_retention_periph.c
rename to components/soc/esp32c5/beta3/system_retention_periph.c
diff --git a/components/soc/esp32c5/timer_periph.c b/components/soc/esp32c5/beta3/timer_periph.c
similarity index 100%
rename from components/soc/esp32c5/timer_periph.c
rename to components/soc/esp32c5/beta3/timer_periph.c
diff --git a/components/soc/esp32c5/uart_periph.c b/components/soc/esp32c5/beta3/uart_periph.c
similarity index 100%
rename from components/soc/esp32c5/uart_periph.c
rename to components/soc/esp32c5/beta3/uart_periph.c
diff --git a/components/soc/esp32c5/gpio_periph.c b/components/soc/esp32c5/gpio_periph.c
deleted file mode 100644
index 0f4938849d..0000000000
--- a/components/soc/esp32c5/gpio_periph.c
+++ /dev/null
@@ -1,39 +0,0 @@
-/*
- * SPDX-FileCopyrightText: 2024 Espressif Systems (Shanghai) CO LTD
- *
- * SPDX-License-Identifier: Apache-2.0
- */
-
-#include "soc/gpio_periph.h"
-
-const uint32_t GPIO_HOLD_MASK[] = {
-    BIT(0),          //GPIO0   // LP_AON_GPIO_HOLD0_REG
-    BIT(1),          //GPIO1
-    BIT(2),          //GPIO2
-    BIT(3),          //GPIO3
-    BIT(4),          //GPIO4
-    BIT(5),          //GPIO5
-    BIT(6),          //GPIO6
-    BIT(7),          //GPIO7
-    BIT(8),          //GPIO8
-    BIT(9),          //GPIO9
-    BIT(10),         //GPIO10
-    BIT(11),         //GPIO11
-    BIT(12),         //GPIO12
-    BIT(13),         //GPIO13
-    BIT(14),         //GPIO14
-    BIT(15),         //GPIO15
-    BIT(16),         //GPIO16
-    BIT(17),         //GPIO17
-    BIT(18),         //GPIO18
-    BIT(19),         //GPIO19
-    BIT(20),         //GPIO20
-    BIT(21),         //GPIO21
-    BIT(22),         //GPIO22
-    BIT(23),         //GPIO23
-    BIT(24),         //GPIO24
-    BIT(25),         //GPIO25
-    BIT(26),         //GPIO26
-};
-
-_Static_assert(sizeof(GPIO_HOLD_MASK) == SOC_GPIO_PIN_COUNT * sizeof(uint32_t), "Invalid size of GPIO_HOLD_MASK");
diff --git a/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in b/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
index 9ee4745d3f..efbb51f916 100644
--- a/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
+++ b/components/soc/esp32c5/include/soc/Kconfig.soc_caps.in
@@ -1,7 +1,6 @@
-#####################################################
-# This file is auto-generated from SoC caps
-# using gen_soc_caps_kconfig.py, do not edit manually
-#####################################################
+if IDF_TARGET_ESP32C5_BETA3_VERSION
+    orsource "../../beta3/include/soc/Kconfig.soc_caps.in"
+endif
 
 config SOC_UART_SUPPORTED
     bool
diff --git a/components/soc/esp32c5/mp/ld/.gitkeep b/components/soc/esp32c5/mp/ld/.gitkeep
new file mode 100644
index 0000000000..e69de29bb2
diff --git a/components/soc/esp32c5/mp/soc/.gitkeep b/components/soc/esp32c5/mp/soc/.gitkeep
new file mode 100644
index 0000000000..e69de29bb2