diff --git a/src/plugins/clangtools/clangtoolruncontrol.cpp b/src/plugins/clangtools/clangtoolruncontrol.cpp
index fda7144704a..c684774ef8d 100644
--- a/src/plugins/clangtools/clangtoolruncontrol.cpp
+++ b/src/plugins/clangtools/clangtoolruncontrol.cpp
@@ -189,7 +189,7 @@ void ClangToolRunWorker::start()
         const AnalyzeInputData input{tool, m_diagnosticConfig, m_temporaryDir.path(),
                                      m_environment, unit};
         const auto setupHandler = [this, unit, tool] {
-            const QString filePath = FilePath::fromString(unit.file).toUserOutput();
+            const QString filePath = unit.file.toUserOutput();
             appendMessage(Tr::tr("Analyzing \"%1\" [%2].").arg(filePath, clangToolName(tool)),
                           Utils::StdOutFormat);
             return true;
@@ -231,7 +231,7 @@ void ClangToolRunWorker::onDone(const AnalyzeOutputData &output)
         m_filesNotAnalyzed.insert(output.fileToAnalyze);
 
         const QString message = Tr::tr("Failed to analyze \"%1\": %2")
-                                    .arg(output.fileToAnalyze, output.errorMessage);
+                                    .arg(output.fileToAnalyze.toUserOutput(), output.errorMessage);
         appendMessage(message, Utils::StdErrFormat);
         appendMessage(output.errorDetails, Utils::StdErrFormat);
         return;
@@ -247,7 +247,8 @@ void ClangToolRunWorker::onDone(const AnalyzeOutputData &output)
         m_filesAnalyzed.remove(output.fileToAnalyze);
         m_filesNotAnalyzed.insert(output.fileToAnalyze);
         qCDebug(LOG) << "onRunnerFinishedWithSuccess: Error reading log file:" << errorMessage;
-        appendMessage(Tr::tr("Failed to analyze \"%1\": %2").arg(output.fileToAnalyze, errorMessage),
+        appendMessage(Tr::tr("Failed to analyze \"%1\": %2")
+                        .arg(output.fileToAnalyze.toUserOutput(), errorMessage),
                       Utils::StdErrFormat);
     } else {
         if (!m_filesNotAnalyzed.contains(output.fileToAnalyze))
diff --git a/src/plugins/clangtools/clangtoolruncontrol.h b/src/plugins/clangtools/clangtoolruncontrol.h
index 4a47e486106..19ad9189af4 100644
--- a/src/plugins/clangtools/clangtoolruncontrol.h
+++ b/src/plugins/clangtools/clangtoolruncontrol.h
@@ -69,8 +69,8 @@ private:
 
     std::unique_ptr<Utils::TaskTree> m_taskTree;
     QSet<Utils::FilePath> m_projectFiles;
-    QSet<QString> m_filesAnalyzed;
-    QSet<QString> m_filesNotAnalyzed;
+    QSet<Utils::FilePath> m_filesAnalyzed;
+    QSet<Utils::FilePath> m_filesNotAnalyzed;
 
     QElapsedTimer m_elapsed;
 };
diff --git a/src/plugins/clangtools/clangtoolrunner.cpp b/src/plugins/clangtools/clangtoolrunner.cpp
index 4c2a908a789..a02ae6912e0 100644
--- a/src/plugins/clangtools/clangtoolrunner.cpp
+++ b/src/plugins/clangtools/clangtoolrunner.cpp
@@ -41,7 +41,7 @@ AnalyzeUnit::AnalyzeUnit(const FileInfo &fileInfo,
                                           UseLanguageDefines::No,
                                           UseBuildSystemWarnings::No,
                                           actualClangIncludeDir);
-    file = fileInfo.file.toString();
+    file = fileInfo.file;
     arguments = extraClangToolsPrependOptions();
     arguments.append(optionsBuilder.build(fileInfo.kind, CppEditor::getPchUsage()));
     arguments.append(extraClangToolsAppendOptions());
@@ -85,9 +85,9 @@ static QStringList clangArguments(const ClangDiagnosticConfig &diagnosticConfig,
     return arguments;
 }
 
-static QString createOutputFilePath(const FilePath &dirPath, const QString &fileToAnalyze)
+static QString createOutputFilePath(const FilePath &dirPath, const FilePath &fileToAnalyze)
 {
-    const QString fileName = QFileInfo(fileToAnalyze).fileName();
+    const QString fileName = fileToAnalyze.fileName();
     const FilePath fileTemplate = dirPath.pathAppended("report-" + fileName + "-XXXXXX");
 
     TemporaryFile temporaryFile("clangtools");
@@ -117,7 +117,7 @@ TaskItem clangToolTask(const AnalyzeInputData &input,
         result << "-export-fixes=" + data->outputFilePath;
         if (!input.overlayFilePath.isEmpty() && isVFSOverlaySupported(data->executable))
             result << "--vfsoverlay=" + input.overlayFilePath;
-        result << QDir::toNativeSeparators(input.unit.file);
+        result << input.unit.file.nativePath();
         return result;
     };
 
@@ -134,8 +134,8 @@ TaskItem clangToolTask(const AnalyzeInputData &input,
         }
 
         QTC_CHECK(!input.unit.arguments.contains(QLatin1String("-o")));
-        QTC_CHECK(!input.unit.arguments.contains(input.unit.file));
-        QTC_ASSERT(FilePath::fromString(input.unit.file).exists(), return TaskAction::StopWithError);
+        QTC_CHECK(!input.unit.arguments.contains(input.unit.file.nativePath()));
+        QTC_ASSERT(input.unit.file.exists(), return TaskAction::StopWithError);
         data->outputFilePath = createOutputFilePath(input.outputDirPath, input.unit.file);
         QTC_ASSERT(!data->outputFilePath.isEmpty(), return TaskAction::StopWithError);
 
diff --git a/src/plugins/clangtools/clangtoolrunner.h b/src/plugins/clangtools/clangtoolrunner.h
index 2ba0af444c3..2ea281810f8 100644
--- a/src/plugins/clangtools/clangtoolrunner.h
+++ b/src/plugins/clangtools/clangtoolrunner.h
@@ -14,12 +14,13 @@ namespace Utils::Tasking { class TaskItem; }
 namespace ClangTools {
 namespace Internal {
 
-struct AnalyzeUnit {
+struct AnalyzeUnit
+{
     AnalyzeUnit(const FileInfo &fileInfo,
                 const Utils::FilePath &clangResourceDir,
                 const QString &clangVersion);
 
-    QString file;
+    Utils::FilePath file;
     QStringList arguments; // without file itself and "-o somePath"
 };
 using AnalyzeUnits = QList<AnalyzeUnit>;
@@ -37,7 +38,7 @@ struct AnalyzeInputData
 struct AnalyzeOutputData
 {
     bool success = true;
-    QString fileToAnalyze;
+    Utils::FilePath fileToAnalyze;
     QString outputFilePath;
     CppEditor::ClangToolType toolType;
     QString errorMessage = {};